A Commercial Compact Integrated Triaxial Fluxgate Sensor Based on 4-D Heterogeneous Multidimensional Integration

IF 5.6 2区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Instrumentation and Measurement Pub Date : 2025-04-30 DOI:10.1109/TIM.2025.3565704

Yuhan Dai;Xiang Qiu;Zhan Pu;Xuecheng Sun;Chong Lei

{"title":"A Commercial Compact Integrated Triaxial Fluxgate Sensor Based on 4-D Heterogeneous Multidimensional Integration","authors":"Yuhan Dai;Xiang Qiu;Zhan Pu;Xuecheng Sun;Chong Lei","doi":"10.1109/TIM.2025.3565704","DOIUrl":null,"url":null,"abstract":"This article presents the design and fabrication of a compact integrated microelectromechanical system (MEMS) triaxial fluxgate sensor based on 4-D heterogeneous multidimensional integration for large-scale commercial high precision navigation grade geomagnetic field detection application, utilizing three fluxgate chiplets and two combined substrates. The sensor achieves full three-component magnetic field detection by bonding the chiplets onto the substrates in orthogonal L-configuration. The fluxgate chiplet measures <inline-formula> <tex-math>$6\\times 3.9\\times 0.5$ </tex-math></inline-formula> mm, while the triaxial fluxgate sensor has dimensions of <inline-formula> <tex-math>$12\\times 11.7\\times 7.2$ </tex-math></inline-formula> mm. This results in a 2.9-fold area increase and only a 20% height increase compared to individual chiplets. The sensor exhibits X-, Y-, and Z-axes sensitivities of 889, 887, and 880 V/T, with noise levels of 0.031, 0.085, and 0.071 nT<inline-formula> <tex-math>$\\surd $ </tex-math></inline-formula>Hz at 1 Hz, respectively, and range of <inline-formula> <tex-math>$\\pm 100~\\mu $ </tex-math></inline-formula>T. In the time drift stability test, three fluxgate chiplets showed noise peak to peak values below 22 nT within one hour, and below 2 nT with 10 s, confirming the time-stability of the sensor. The orthogonality error of the sensor reaches 1°. A neural network-based error correction method significantly improves measurement accuracy, reducing the fluctuation range from 28.4917 to <inline-formula> <tex-math>$1.3015~\\mu $ </tex-math></inline-formula>T. This advancement in miniaturized fluxgate sensor technology promises broad applications in geomagnetic field detection.","PeriodicalId":13341,"journal":{"name":"IEEE Transactions on Instrumentation and Measurement","volume":"74 ","pages":"1-7"},"PeriodicalIF":5.6000,"publicationDate":"2025-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Instrumentation and Measurement","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10981581/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

Abstract

This article presents the design and fabrication of a compact integrated microelectromechanical system (MEMS) triaxial fluxgate sensor based on 4-D heterogeneous multidimensional integration for large-scale commercial high precision navigation grade geomagnetic field detection application, utilizing three fluxgate chiplets and two combined substrates. The sensor achieves full three-component magnetic field detection by bonding the chiplets onto the substrates in orthogonal L-configuration. The fluxgate chiplet measures

$6\times 3.9\times 0.5$

mm, while the triaxial fluxgate sensor has dimensions of

$12\times 11.7\times 7.2$

mm. This results in a 2.9-fold area increase and only a 20% height increase compared to individual chiplets. The sensor exhibits X-, Y-, and Z-axes sensitivities of 889, 887, and 880 V/T, with noise levels of 0.031, 0.085, and 0.071 nT

$\surd $

Hz at 1 Hz, respectively, and range of

$\pm 100~\mu $

T. In the time drift stability test, three fluxgate chiplets showed noise peak to peak values below 22 nT within one hour, and below 2 nT with 10 s, confirming the time-stability of the sensor. The orthogonality error of the sensor reaches 1°. A neural network-based error correction method significantly improves measurement accuracy, reducing the fluctuation range from 28.4917 to

$1.3015~\mu $

T. This advancement in miniaturized fluxgate sensor technology promises broad applications in geomagnetic field detection.

查看原文本刊更多论文

基于四维异构多维集成的商用紧凑型三轴磁通门传感器

本文介绍了一种基于四维异构多维集成的紧凑集成微机电系统（MEMS）三轴磁通门传感器的设计和制造，该传感器采用三个磁通门芯片和两个组合衬底，用于大规模商业高精度导航级地磁场检测。该传感器通过将芯片以正交l型连接到基板上，实现了全三分量磁场检测。磁通门芯片的尺寸为$6\times 3.9\times 0.5$ mm，而三轴磁通门传感器的尺寸为$12\times 11.7\times 7.2$ mm。与单个芯片相比，这导致面积增加2.9倍，高度仅增加20%。该传感器的X、Y、z轴灵敏度分别为889、887、880 V/T，在1 Hz时噪声水平分别为0.031、0.085和0.071 nT $ $ $ Hz，范围为$ $ pm 100~ $ $ mu $ T。在时间漂移稳定性测试中，三个磁通门芯片在1小时内出现峰值到峰值低于22 nT， 10 s后出现峰值低于2 nT，证实了传感器的时间稳定性。传感器的正交度误差达到1°。基于神经网络的误差校正方法显著提高了测量精度，将波动范围从28.4917美元减小到1.3015美元~\mu $ t，这一小型化磁通门传感器技术的进步有望在地磁场检测中得到广泛应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

IEEE Transactions on Instrumentation and Measurement 工程技术-工程：电子与电气

CiteScore

9.00

自引率

23.20%

发文量

1294

审稿时长

3.9 months

期刊介绍： Papers are sought that address innovative solutions to the development and use of electrical and electronic instruments and equipment to measure, monitor and/or record physical phenomena for the purpose of advancing measurement science, methods, functionality and applications. The scope of these papers may encompass: (1) theory, methodology, and practice of measurement; (2) design, development and evaluation of instrumentation and measurement systems and components used in generating, acquiring, conditioning and processing signals; (3) analysis, representation, display, and preservation of the information obtained from a set of measurements; and (4) scientific and technical support to establishment and maintenance of technical standards in the field of Instrumentation and Measurement.