Chemically bonded flexible pressure sensor based on divergent metallic grid with high linearity, low hysteresis, and excellent stability

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-05-10 DOI:10.1016/j.sna.2025.116670

Guoxi Luo , Bingcheng Zhang , Diying Pi , Min Li , Ping Yang , Libo Zhao

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引用次数: 0

Abstract

As intelligent robots and smart wearable electronics become commonplace, the demand for flexible pressure sensors is increasing rapidly. Despite the enormous effort in the development of flexible pressure sensor with high sensitivity, limited progress has been made in terms of developing a flexible pressure sensor with high linearity, low hysteresis, and high stability to avoid additional signal processing and signal distortion, and meanwhile promise good accuracy. Herein, we developed a flexible pressure sensor on foundation of the metallic strain effect. The divergent metallic grid was manufactured on polymide (PI) film with the mature magnetron sputtering and lift-off method, and a novel chemical bonding between PI and outer covering polydimethylsiloxane (PDMS) was developed for a flexible encapsulation. Benefiting from the excellent intrinsic properties of rigid sensitive materials and high-strength bonding. The as-fabricated pressure sensors exhibited several superior properties that are characterized by high linearity (linear regression coefficient of R² = 0.991) in whole sensing range (0–620 kPa), low hysteresis (2.78 %), rapid response/relaxation time (ca. 29/21 ms), remarkable durability (over 13,000 bending and stretching cycles), and excellent stability. The integrated merits of this novel pressure sensor were demonstrated in applications including human physiological signal monitoring, material identification, and pressure space mapping.

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基于发散型金属网格的化学键合柔性压力传感器，具有高线性度、低迟滞和优异的稳定性

随着智能机器人和智能可穿戴电子产品的普及，对柔性压力传感器的需求正在迅速增加。尽管在开发高灵敏度柔性压力传感器方面付出了巨大的努力，但在开发高线性度、低滞后和高稳定性的柔性压力传感器以避免额外的信号处理和信号失真，同时保证良好的精度方面进展有限。本文在金属应变效应的基础上，研制了一种柔性压力传感器。采用成熟的磁控溅射和起飞方法在聚酰胺（PI）薄膜上制备了发散型金属栅格，并在PI薄膜与外层聚二甲基硅氧烷（PDMS）之间建立了一种新型的化学键合，实现了柔性封装。得益于刚性敏感材料优异的固有性能和高强度粘接。所制备的压力传感器在整个传感范围（0-620 kPa）具有高线性（线性回归系数R2 = 0.991）、低滞后（2.78 %）、快速响应/弛缓时间（约29/21 ms）、优异的耐用性（超过13,000次弯曲和拉伸循环）和优异的稳定性。该传感器在人体生理信号监测、材料识别、压力空间测绘等方面的应用证明了其综合优点。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...