Jinwei Hu, Bosen Wang, Xingyun Li, Ming Yuwen, Bo Zhang, Lianying Zhu, Jun Xu, Deyi Fu, Rong Zhang
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引用次数: 0
Abstract
Two-dimensional tellurium (Te) has been intensely studied in recent years due to its outstanding electrical properties and excellent air stability. Simple and effective contact engineering is highly desirable to further improve its device performance. In this work, we demonstrate a simple strategy to largely improve the metal–Te contact quality by forming an ultrathin tellurium oxide layer in the contact region via O2 plasma treatment. The surface oxide doped the underlying Te layers degenerately due to charge transfer, establishing an Ohmic contact between Pd electrode and Te with negative Schottky barrier under flatband condition. This enables Te field-effect transistor to achieve outstanding electronic performance, including a record-low contact resistance of ∼0.16 kΩ·μm and a high field-effect mobility of ∼1015 cm2V−1s−1 (∼3002 cm2V−1s−1) at room temperature (low temperature). The simplicity and CMOS compatibility of O2 plasma treatment make it a promising candidate for applications in Te-based large-scale integrated circuits.
期刊介绍:
Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology.
In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics.
APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field.
Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.