{"title":"Analysis on sensitivity enhancement of MEMS based capacitive pressure sensor for low pressure healthcare monitoring","authors":"Kavitha Jagabathuni, Swapna Peravali","doi":"10.1007/s10470-025-02411-2","DOIUrl":null,"url":null,"abstract":"<div><p>This research outlines the design and computational modelling of a MEMS-based capacitive pressure sensor, incorporating a circular diaphragm with meandering structures and perforations, for the purpose of low-pressure healthcare monitoring applications. The parameters maximum diaphragm deflection, capacitance variation, mechanical sensitivity, capacitive sensitivity and Eigen frequency have been analyzed in the low-pressure range of 0–3 kPa. High sensitivity is achieved by developing enhanced deflections in the diaphragm by using the crab-leg meanders. The design is also compared with the basic structures without meanders and inferred that the perforated diaphragm with meanders shows large sensitivity of 2.5461 kPa<sup>−1</sup>. The design is well suited in the low-pressure range of 0–3 kPa for health care monitoring.</p></div>","PeriodicalId":7827,"journal":{"name":"Analog Integrated Circuits and Signal Processing","volume":"124 1","pages":""},"PeriodicalIF":1.2000,"publicationDate":"2025-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Analog Integrated Circuits and Signal Processing","FirstCategoryId":"5","ListUrlMain":"https://link.springer.com/article/10.1007/s10470-025-02411-2","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"COMPUTER SCIENCE, HARDWARE & ARCHITECTURE","Score":null,"Total":0}
引用次数: 0
Abstract
This research outlines the design and computational modelling of a MEMS-based capacitive pressure sensor, incorporating a circular diaphragm with meandering structures and perforations, for the purpose of low-pressure healthcare monitoring applications. The parameters maximum diaphragm deflection, capacitance variation, mechanical sensitivity, capacitive sensitivity and Eigen frequency have been analyzed in the low-pressure range of 0–3 kPa. High sensitivity is achieved by developing enhanced deflections in the diaphragm by using the crab-leg meanders. The design is also compared with the basic structures without meanders and inferred that the perforated diaphragm with meanders shows large sensitivity of 2.5461 kPa−1. The design is well suited in the low-pressure range of 0–3 kPa for health care monitoring.
期刊介绍：
Analog Integrated Circuits and Signal Processing is an archival peer reviewed journal dedicated to the design and application of analog, radio frequency (RF), and mixed signal integrated circuits (ICs) as well as signal processing circuits and systems. It features both new research results and tutorial views and reflects the large volume of cutting-edge research activity in the worldwide field today.
A partial list of topics includes analog and mixed signal interface circuits and systems; analog and RFIC design; data converters; active-RC, switched-capacitor, and continuous-time integrated filters; mixed analog/digital VLSI systems; wireless radio transceivers; clock and data recovery circuits; and high speed optoelectronic circuits and systems.
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