Mid-infrared integrated spectroscopic sensor based on chalcogenide glasses: Optical characterization and sensing applications

Advanced Sensor and Energy Materials Pub Date : 2025-03-18 DOI:10.1016/j.asems.2025.100149

S. Meziani , A. Hammouti , L. Bodiou , N. Lorrain , R. Chahal , A. Bénardais , R. Courson , J. Troles , C. Boussard-Plédel , V. Nazabal , J. Charrier

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Abstract

A mid-infrared (mid-IR) spectroscopic sensor is developed using a chalcogenide glasses (ChGs) platform with a broad transmission band. The ridge ChGs waveguides were patterned via standard i-line photolithography and reactive ion etching, following the deposition of guiding and confinement layers through RF magnetron sputtering. The waveguides exhibit a wide transparency range from λ = 3.94–8.95 μm, with minimum propagation losses value of 2.5 dB/cm at λ = 7.58 μm. To validate the feasibility of the suggested sensor, a spectroscopic gas sensing experiment was performed using CO₂, resulting in an estimated limit of detection (LoD) of 1.16%v at λ = 4.28 μm, achieved with an external confinement factor Γ of 6.5%. Additionally, liquid sensing experiment was carried out using isopropanol, obtaining a LoD of 300 ppmv at λ = 7.25 μm.

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基于硫系玻璃的中红外集成光谱传感器：光学特性和传感应用

采用宽频带硫系玻璃（ChGs）平台，研制了一种中红外光谱传感器。在射频磁控溅射沉积引导层和约束层之后，采用标准的i线光刻和反应离子刻蚀技术对脊状ChGs波导进行了图形化处理。该波导在λ = 3.94 ~ 8.95 μm范围内具有较宽的透明度，在λ = 7.58 μm处传输损耗最小，为2.5 dB/cm。为了验证该传感器的可行性，利用CO2进行了光谱气体传感实验，在λ = 4.28 μm时，估计的检测限（LoD）为1.16%v，外部约束因子Γ为6.5%。利用异丙醇进行了液体传感实验，在λ = 7.25 μm处测得的LoD为300 ppmv。

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Advanced Sensor and Energy Materials

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