A fast and high-precision embedded compensation system for multi-effector micro-manipulator

IF 7.1 1区工程技术 Q1 ENGINEERING, MECHANICAL

International Journal of Mechanical Sciences Pub Date : 2025-05-07 DOI:10.1016/j.ijmecsci.2025.110357

Fei Lu, Weishan Chen, Jie Deng, Shijing Zhang, Yingxiang Liu

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引用次数: 0

Abstract

Multi-effector micro-manipulator (MEMM) systems are favored for transporting and manipulating targets due to their multiple degrees of freedom (multi-DOF) operation capabilities. However, the complex structure adopted to achieve multi-DOF operation capabilities poses a great challenge to the improvement of the MEMM performance, especially the speed and precision. In this study, a multi-DOF piezo-array embedded four-effector manipulator is used to investigate the influence of multi-effector and the complex structure on the performance of the MEMM. A predictive digital model is introduced to analyze the output characteristics of the MEMM and evaluate the effects of different compensation methods. Both model predictions and experimental results show that the low-order modal coupling of the complex structure significantly affects the output characteristics of the MEMM and induces residual and coupled vibrations. The proposed embedded internal model compensation (EIMC) method, which utilizes the predictive capabilities of the digital model and the embedded computing capabilities of the embedded system, effectively reduces the residual and coupled vibrations of the MEMM (typical efficiency 74.4%∼85.8%), and ultimately achieves an average convergence time of 0.0005 s and a precision of ±0.06 μm. Compared with ramp compensation (RC) method and PID control, the EIMC method improves the speed performance of the MEMM by more than 70% and the precision performance by more than 50%. These findings are expected to mitigate vibration problems in rapid-positioning, potentially expanding MEMM applications in medical sample processing, optical focusing and image scanning.

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一种多效应器微机械臂快速高精度嵌入式补偿系统

多效应器微机械臂（MEMM）系统由于具有多自由度的操作能力，在运输和操纵目标方面受到青睐。然而，为实现多自由度操作能力而采用的复杂结构对MEMM性能的提高，特别是速度和精度的提高提出了很大的挑战。本文采用多自由度压电阵列嵌入式四效应器机械臂，研究了多效应器和复杂结构对MEMM性能的影响。引入预测数字模型，分析MEMM输出特性，评估不同补偿方法的效果。模型预测和实验结果均表明，复杂结构的低阶模态耦合对MEMM输出特性有显著影响，并引起残余振动和耦合振动。所提出的嵌入式内模补偿（EIMC）方法利用了数字模型的预测能力和嵌入式系统的嵌入式计算能力，有效地降低了MEMM的残余振动和耦合振动（典型效率74.4% ~ 85.8%），最终实现了0.0005 s的平均收敛时间和±0.06 μm的精度。与斜坡补偿（RC）方法和PID控制相比，EIMC方法使MEMM的速度性能提高70%以上，精度性能提高50%以上。这些发现有望缓解快速定位中的振动问题，潜在地扩大MEMM在医疗样品处理、光学聚焦和图像扫描方面的应用。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal of Mechanical Sciences 工程技术-工程：机械

CiteScore

12.80

自引率

17.80%

发文量

769

审稿时长

19 days

期刊介绍： The International Journal of Mechanical Sciences (IJMS) serves as a global platform for the publication and dissemination of original research that contributes to a deeper scientific understanding of the fundamental disciplines within mechanical, civil, and material engineering. The primary focus of IJMS is to showcase innovative and ground-breaking work that utilizes analytical and computational modeling techniques, such as Finite Element Method (FEM), Boundary Element Method (BEM), and mesh-free methods, among others. These modeling methods are applied to diverse fields including rigid-body mechanics (e.g., dynamics, vibration, stability), structural mechanics, metal forming, advanced materials (e.g., metals, composites, cellular, smart) behavior and applications, impact mechanics, strain localization, and other nonlinear effects (e.g., large deflections, plasticity, fracture). Additionally, IJMS covers the realms of fluid mechanics (both external and internal flows), tribology, thermodynamics, and materials processing. These subjects collectively form the core of the journal's content. In summary, IJMS provides a prestigious platform for researchers to present their original contributions, shedding light on analytical and computational modeling methods in various areas of mechanical engineering, as well as exploring the behavior and application of advanced materials, fluid mechanics, thermodynamics, and materials processing.