Flexible Embedded Metal Meshes by Nanosphere Lithography for Very Low Sheet Resistance Transparent Electrodes, Joule Heating, and Electromagnetic Interference Shielding

IF 4.3 3区材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

ACS Applied Electronic Materials Pub Date : 2025-04-28 DOI:10.1021/acsaelm.5c0042510.1021/acsaelm.5c00425

Mehdi Zarei, Khashayar Mohammadi, Abdullah A Mahmood, Mingxuan Li and Paul W. Leu*,

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引用次数: 0

Abstract

We demonstrate the highest transparent electrode performance among metal meshes fabricated via nanosphere lithography (NSL), achieving an order-of-magnitude improvement in the figure of merit FoM (σ_DC/σ_OP). Additionally, we present, for the first time, the application of metal meshes fabricated by NSL for transparent electromagnetic interference (EMI) shielding, enabled by exceptional improvements in sheet resistance. Our NSL method produces substrate-embedded metal meshes in PET and glass by etching trenches, yielding high-aspect-ratio features with low sheet resistance. Embedded structures also exhibit superior robustness during bending and tape tests compared to sputtered metallic films on the surface. As a transparent electrode, the flexible Ag meshes exhibit a sheet resistance of 1.52 Ω/sq and transparency of 73.1% as well as a sheet resistance of 0.22 Ω/sq and transparency of 58.1%, corresponding to FoMs of 737 and 2736, respectively. For transparent EMI shielding, the flexible metal meshes achieve a shielding efficiency (SE) of 34.5 dB with 73.1% visible transmission and an EMI SE of 52.8 dB with 58.1% visible transmission. As a flexible heater, the metal meshes can reach a saturation temperature exceeding 70^◦C within 60 s under an applied voltage of 1.2 V. These embedded metal meshes hold promise for applications requiring ultralow sheet resistance, including heated windows and defrosting systems, large-area organic light-emitting diode (OLED) lighting and displays, solar cells, and EMI shielding.

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纳米球光刻技术用于极低片阻透明电极、焦耳加热和电磁干扰屏蔽的柔性嵌入式金属网

在纳米球光刻（NSL）制备的金属网中，我们展示了最高的透明电极性能，实现了FoM （σDC/σOP）数量级的改进。此外，我们首次提出了由NSL制造的金属网用于透明电磁干扰（EMI）屏蔽的应用，这是由于薄片电阻的显著改善。我们的NSL方法通过蚀刻沟槽在PET和玻璃中产生衬底嵌入的金属网格，产生高纵横比特征和低片电阻。与表面溅射金属薄膜相比，嵌入式结构在弯曲和胶带测试中也表现出优越的坚固性。作为透明电极，柔性Ag网的片电阻为1.52 Ω/sq，透明度为73.1%，片电阻为0.22 Ω/sq，透明度为58.1%，分别对应于FoMs的737和2736。对于透明EMI屏蔽，柔性金属网的屏蔽效率（SE）为34.5 dB，可见透射率为73.1%，EMI SE为52.8 dB，可见透射率为58.1%。作为一个灵活的加热器，金属网可以达到饱和温度超过70◦C在60秒内施加电压为1.2 V。这些嵌入式金属网有望应用于需要超低板电阻的应用，包括加热窗户和除霜系统，大面积有机发光二极管（OLED）照明和显示器，太阳能电池和EMI屏蔽。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

ACS Applied Electronic Materials Multiple-

CiteScore

7.20

自引率

4.30%

发文量

567

期刊介绍： ACS Applied Electronic Materials is an interdisciplinary journal publishing original research covering all aspects of electronic materials. The journal is devoted to reports of new and original experimental and theoretical research of an applied nature that integrate knowledge in the areas of materials science, engineering, optics, physics, and chemistry into important applications of electronic materials. Sample research topics that span the journal's scope are inorganic, organic, ionic and polymeric materials with properties that include conducting, semiconducting, superconducting, insulating, dielectric, magnetic, optoelectronic, piezoelectric, ferroelectric and thermoelectric. Indexed/Abstracted： Web of Science SCIE Scopus CAS INSPEC Portico