A tip-tilt-piston piezoelectric micromirror with double-S shaped actuators based on sputtered PZT

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-05-05 DOI:10.1016/j.sna.2025.116666

Ke Cao , Qincheng Zheng , Hao Chen , Bo Xie , Ning Deng , Hui Shang , Yao Lu , Huikai Xie

{"title":"A tip-tilt-piston piezoelectric micromirror with double-S shaped actuators based on sputtered PZT","authors":"Ke Cao , Qincheng Zheng , Hao Chen , Bo Xie , Ning Deng , Hui Shang , Yao Lu , Huikai Xie","doi":"10.1016/j.sna.2025.116666","DOIUrl":null,"url":null,"abstract":"<div><div>To address the issues related to the structural constraints, thin-film stresses, and limited piezoelectric coefficients in tip-tilt-piston (TTP) piezoelectric micromirrors, a double-S-shaped piezoelectric actuator design is proposed to construct a TTP piezoelectric micromirror based on low-stress sputtered PZT thin film. A TTP piezoelectric micromirror with a 1 mm× 1 mm optical aperture has been designed, fabricated, and tested. The double-S piezoelectric actuator design enables large displacement. The sputtered PZT thin film exhibited relatively low stress of about 30 MPa. The maximum initial elevation of the double-S actuators was only about 10 μm. The maximum vertical displacement reached 41 μm at the frequency of 3.5 kHz. Under a driving voltage of 30 Vac at a resonant frequency of nearly 6.2 kHz, the tip and tilt optical scanning angles reach 16.2° and 15.6°, respectively. This high-frequency TTP micromirror, with a large optical aperture and scanning range, holds promise for various applications, especially in medical endoscopic imaging and optical phase modulation.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"391 ","pages":"Article 116666"},"PeriodicalIF":4.1000,"publicationDate":"2025-05-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators A-physical","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924424725004728","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

Abstract

To address the issues related to the structural constraints, thin-film stresses, and limited piezoelectric coefficients in tip-tilt-piston (TTP) piezoelectric micromirrors, a double-S-shaped piezoelectric actuator design is proposed to construct a TTP piezoelectric micromirror based on low-stress sputtered PZT thin film. A TTP piezoelectric micromirror with a 1 mm× 1 mm optical aperture has been designed, fabricated, and tested. The double-S piezoelectric actuator design enables large displacement. The sputtered PZT thin film exhibited relatively low stress of about 30 MPa. The maximum initial elevation of the double-S actuators was only about 10 μm. The maximum vertical displacement reached 41 μm at the frequency of 3.5 kHz. Under a driving voltage of 30 Vac at a resonant frequency of nearly 6.2 kHz, the tip and tilt optical scanning angles reach 16.2° and 15.6°, respectively. This high-frequency TTP micromirror, with a large optical aperture and scanning range, holds promise for various applications, especially in medical endoscopic imaging and optical phase modulation.

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一种基于溅射PZT的双s形压电微镜

针对TTP压电微镜的结构约束、薄膜应力和压电系数有限等问题，提出了基于低应力溅射PZT薄膜的双s型压电致动器设计，构建TTP压电微镜。设计、制作并测试了一种光学孔径为1 mm× 1 mm的TTP压电微镜。双s型压电驱动器设计，实现大位移。溅射后的PZT薄膜的应力相对较低，约为30 MPa。双s型作动器的最大初始仰角仅为10 μm左右。在3.5 kHz频率下，垂直位移最大达到41 μm。当驱动电压为30 Vac，谐振频率接近6.2 kHz时，尖端和倾斜光学扫描角分别达到16.2°和15.6°。这种高频TTP微镜具有较大的光学孔径和扫描范围，具有各种应用前景，特别是在医学内窥镜成像和光学相位调制方面。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...