Multilayer W-doped vanadium dioxide thermal sensors with extended operation region

IF 4.6 2区综合性期刊 Q1 MULTIDISCIPLINARY SCIENCES

iScience Pub Date : 2025-04-24 DOI:10.1016/j.isci.2025.112528

Callum Wheeler , Yuxiao Zhu , Kai Sun , Bohao Ding , Ruomeng Huang , Otto L. Muskens , C.H. (Kees) de Groot

{"title":"Multilayer W-doped vanadium dioxide thermal sensors with extended operation region","authors":"Callum Wheeler , Yuxiao Zhu , Kai Sun , Bohao Ding , Ruomeng Huang , Otto L. Muskens , C.H. (Kees) de Groot","doi":"10.1016/j.isci.2025.112528","DOIUrl":null,"url":null,"abstract":"<div><div>Bolometers rely upon the temperature coefficient of resistance (TCR) of their underpinning sensing layer to detect infrared radiation. Vanadium dioxide (VO<sub>2</sub>) exhibits a very large, but abrupt TCR associated with its monoclinic to rutile phase transition. W-doping of VO<sub>2</sub> lowers and broadens its transition temperature, and by combining multiple discrete W:VO<sub>2</sub> layers, a sensing layer can be created with an extended temperature operation region. Herein, we report such a multilayer W:VO<sub>2</sub> thin film by atomic layer deposition (ALD). The film displays an average TCR of −9.5 (±3.5) %K<sup>−1</sup> from 30°C to 60°C. A sensing layer consisting of 10 individual W:VO<sub>2</sub> layers is simulated with a multi-objective genetic algorithm (MOGA) for maximum average TCR (μ) and minimum variation (σ) across an extended target temperature range producing an optimized layer structure at max (<span><math><mrow><mrow><mo>|</mo><mi>μ</mi><mo>|</mo></mrow><mo>−</mo><mi>σ</mi></mrow></math></span>) with average TCR response of −6.7 (±0.9) %K<sup>−1</sup> from 20°C to 70°C. This work highlights the potential for the broader application of uncooled bolometers.</div></div>","PeriodicalId":342,"journal":{"name":"iScience","volume":"28 6","pages":"Article 112528"},"PeriodicalIF":4.6000,"publicationDate":"2025-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"iScience","FirstCategoryId":"103","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2589004225007898","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MULTIDISCIPLINARY SCIENCES","Score":null,"Total":0}

引用次数: 0

Abstract

Bolometers rely upon the temperature coefficient of resistance (TCR) of their underpinning sensing layer to detect infrared radiation. Vanadium dioxide (VO₂) exhibits a very large, but abrupt TCR associated with its monoclinic to rutile phase transition. W-doping of VO₂ lowers and broadens its transition temperature, and by combining multiple discrete W:VO₂ layers, a sensing layer can be created with an extended temperature operation region. Herein, we report such a multilayer W:VO₂ thin film by atomic layer deposition (ALD). The film displays an average TCR of −9.5 (±3.5) %K⁻¹ from 30°C to 60°C. A sensing layer consisting of 10 individual W:VO₂ layers is simulated with a multi-objective genetic algorithm (MOGA) for maximum average TCR (μ) and minimum variation (σ) across an extended target temperature range producing an optimized layer structure at max (

| μ | - σ

) with average TCR response of −6.7 (±0.9) %K⁻¹ from 20°C to 70°C. This work highlights the potential for the broader application of uncooled bolometers.

Abstract Image

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扩展工作区域的多层掺w二氧化钒热传感器

辐射热计依靠其基础感测层的电阻温度系数（TCR）来探测红外辐射。二氧化钒（VO2）的单斜晶向金红石相转变时，表现出非常大但突然的TCR。VO2的W掺杂降低并拓宽了其转变温度，并且通过将多个离散的W:VO2层组合在一起，可以创建具有扩展温度工作区域的传感层。本文报道了采用原子层沉积（ALD）法制备的多层W:VO2薄膜。从30°C到60°C，薄膜的平均TCR为- 9.5（±3.5）%K−1。利用多目标遗传算法（MOGA）模拟了一个由10个W:VO2层组成的传感层，在扩展的目标温度范围内，最大平均TCR （μ）和最小变化（σ）得到了优化的层结构，在20℃至70℃范围内，最大平均TCR响应（|μ|−σ）为- 6.7（±0.9）%K−1。这项工作突出了非冷却热辐射计更广泛应用的潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

iScience Multidisciplinary-Multidisciplinary

CiteScore

7.20

自引率

1.70%

发文量

1972

审稿时长

6 weeks

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