Biomimetic moth-eye structures fabricated by double-exposure lithography using coplanar three-beam laser interference

IF 2 3区物理与天体物理 Q3 OPTICS

Applied Physics B Pub Date : 2025-05-09 DOI:10.1007/s00340-025-08474-3

Litong Dong, Xiangyu Li, Mengnan Liu, Lu Wang, Zuobin Wang, Dayou Li

引用次数: 0

Abstract

This study presents a coplanar three-beam laser interference lithography (LIL) method for fabricating biomimetic moth-eye structures. The research delves into the mechanism of cross-scale two-periodic structure formation and devises a double-exposure lithography approach based on coplanar three-beam interference to regulate the parameters of these structures. A comparison with microlens arrays of the same period reveals that the biomimetic moth-eye structure shows enhanced transmittance and a wider field of view, attributable to its internal nanoscale arrays. The contrast of diffracted light distribution between the two structures further validates that the unique structural features of the biomimetic moth-eye structure lead to a more uniform light distribution. This work offers a facile method for fabricating biomimetic moth-eye structures, holding potential applications in diverse optical domains, including high-efficiency optical sensors, anti-reflective coatings, and advanced imaging systems.

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用共面三束激光干涉双曝光光刻制备仿生蛾眼结构

本文提出了一种用共面三光束激光干涉光刻（LIL）技术制造仿生蛾眼结构的方法。研究了跨尺度双周期结构的形成机理，提出了一种基于共面三束干涉的双曝光光刻方法来调节这些结构的参数。通过与同期微透镜阵列的比较发现，由于其内部的纳米级阵列，仿生蛾眼结构具有更高的透光率和更宽的视野。两种结构之间衍射光分布的对比进一步验证了仿生蛾眼结构独特的结构特征导致了更均匀的光分布。这项工作为制造仿生蛾眼结构提供了一种简便的方法，在各种光学领域具有潜在的应用前景，包括高效光学传感器、抗反射涂层和先进的成像系统。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Applied Physics B 物理-光学

CiteScore

4.00

自引率

4.80%

发文量

202

审稿时长

3.0 months

期刊介绍： Features publication of experimental and theoretical investigations in applied physics Offers invited reviews in addition to regular papers Coverage includes laser physics, linear and nonlinear optics, ultrafast phenomena, photonic devices, optical and laser materials, quantum optics, laser spectroscopy of atoms, molecules and clusters, and more 94% of authors who answered a survey reported that they would definitely publish or probably publish in the journal again Publishing essential research results in two of the most important areas of applied physics, both Applied Physics sections figure among the top most cited journals in this field. In addition to regular papers Applied Physics B: Lasers and Optics features invited reviews. Fields of topical interest are covered by feature issues. The journal also includes a rapid communication section for the speedy publication of important and particularly interesting results.