The thermal stability of Er2O3 anti-reflective films deposited on CVD diamond by magnetron sputtering

IF 5.1 2区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Ceramics International Pub Date : 2025-05-01 DOI:10.1016/j.ceramint.2025.01.530

Yabo Huang , Xia Zhao , Xiaohua Zhu , Shengji Liu , Xulei Wang , Yuehan Yue , Weishuai Sun , Pei Wang , Xiaoqin Guo , Chengming Li

{"title":"The thermal stability of Er2O3 anti-reflective films deposited on CVD diamond by magnetron sputtering","authors":"Yabo Huang , Xia Zhao , Xiaohua Zhu , Shengji Liu , Xulei Wang , Yuehan Yue , Weishuai Sun , Pei Wang , Xiaoqin Guo , Chengming Li","doi":"10.1016/j.ceramint.2025.01.530","DOIUrl":null,"url":null,"abstract":"<div><div>Erbium oxide (Er2O3) films with excellent thermal and optical performance are essential for application as heat-resistant and anti-reflective (AR) materials in chemical vapor deposition (CVD) diamond infrared windows. In this study, the thermal stability of Er2O3 AR films was investigated by heat treatment. The phase composition, microstructure, thermogravimetric analysis, mechanical properties, and infrared (IR) transmission performances of the Er2O3 AR films were thoroughly investigated. The results show that the cubic (222) plane orientation of the Er2O3 AR films after heat treatment was preferential to that at room temperature. No significant change was observed in the DSC and TG curve at the temperature varied, but the DSC curve of the Er2O3 AR films revealed two distinct stages at 502 °C and 798 °C owing to the formation of Er2O3 (420) and (134) planes. Specifically, the phase structure remained unchanged by high-resolution transmission electron microscope (HRTEM) observation, and the peak at 578.4 cm−1 was the only obvious impurity peak in the Raman spectrum owing to the introduction of the Er–O bond. Additionally, significant shedding of the Er2O3 AR films on the surface of the CVD diamond occurred at high temperatures. The grain size and roughness increased as the temperature increased, adversely affecting the continuous abrasion resistance of the Er2O3 AR films. Moreover, the Er2O3 AR films exhibited outstanding mechanical and optical properties at 800 °C, achieving a depth of only 0.65 μm and a maximum transmittance increased from 65 % of diamond to 76 %. This study provides valuable insights into the thermal stability of the Er2O3 AR films under high temperature application scenarios.</div></div>","PeriodicalId":267,"journal":{"name":"Ceramics International","volume":"51 13","pages":"Pages 17568-17574"},"PeriodicalIF":5.1000,"publicationDate":"2025-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Ceramics International","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0272884225005887","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MATERIALS SCIENCE, CERAMICS","Score":null,"Total":0}

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Abstract

Erbium oxide (Er₂O₃) films with excellent thermal and optical performance are essential for application as heat-resistant and anti-reflective (AR) materials in chemical vapor deposition (CVD) diamond infrared windows. In this study, the thermal stability of Er₂O₃ AR films was investigated by heat treatment. The phase composition, microstructure, thermogravimetric analysis, mechanical properties, and infrared (IR) transmission performances of the Er₂O₃ AR films were thoroughly investigated. The results show that the cubic (222) plane orientation of the Er₂O₃ AR films after heat treatment was preferential to that at room temperature. No significant change was observed in the DSC and TG curve at the temperature varied, but the DSC curve of the Er₂O₃ AR films revealed two distinct stages at 502 °C and 798 °C owing to the formation of Er₂O₃ (420) and (134) planes. Specifically, the phase structure remained unchanged by high-resolution transmission electron microscope (HRTEM) observation, and the peak at 578.4 cm⁻¹ was the only obvious impurity peak in the Raman spectrum owing to the introduction of the Er–O bond. Additionally, significant shedding of the Er₂O₃ AR films on the surface of the CVD diamond occurred at high temperatures. The grain size and roughness increased as the temperature increased, adversely affecting the continuous abrasion resistance of the Er₂O₃ AR films. Moreover, the Er₂O₃ AR films exhibited outstanding mechanical and optical properties at 800 °C, achieving a depth of only 0.65 μm and a maximum transmittance increased from 65 % of diamond to 76 %. This study provides valuable insights into the thermal stability of the Er₂O₃ AR films under high temperature application scenarios.

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磁控溅射沉积在CVD金刚石表面的Er2O3增透膜的热稳定性

氧化铒（Er2O3）薄膜具有优异的热学和光学性能，是化学气相沉积（CVD）金刚石红外窗中耐热和抗反射（AR）材料的重要组成部分。本研究通过热处理研究了Er2O3 AR膜的热稳定性。研究了Er2O3 AR膜的相组成、微观结构、热重分析、力学性能和红外透射性能。结果表明：热处理后的Er2O3 AR膜的立方（222）面取向优于常温下的取向；温度变化时的DSC和TG曲线没有明显变化，但在502℃和798℃时，由于Er2O3（420）和（134）平面的形成，Er2O3 AR膜的DSC曲线呈现出两个不同的阶段。通过高分辨率透射电镜（HRTEM）观察，相结构保持不变，578.4 cm−1处的峰是拉曼光谱中唯一明显的杂质峰，这是由于Er-O键的引入。此外，在高温下，CVD金刚石表面的Er2O3 AR膜发生了明显的脱落。随着温度的升高，晶粒尺寸和粗糙度增大，对Er2O3 AR膜的连续耐磨性产生不利影响。此外，在800°C时，Er2O3 AR膜表现出优异的机械和光学性能，膜深仅为0.65 μm，最大透过率从金刚石的65%提高到76%。该研究为Er2O3 AR膜在高温应用场景下的热稳定性提供了有价值的见解。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Ceramics International 工程技术-材料科学：硅酸盐

CiteScore

9.40

自引率

15.40%

发文量

4558

审稿时长

25 days

期刊介绍： Ceramics International covers the science of advanced ceramic materials. The journal encourages contributions that demonstrate how an understanding of the basic chemical and physical phenomena may direct materials design and stimulate ideas for new or improved processing techniques, in order to obtain materials with desired structural features and properties. Ceramics International covers oxide and non-oxide ceramics, functional glasses, glass ceramics, amorphous inorganic non-metallic materials (and their combinations with metal and organic materials), in the form of particulates, dense or porous bodies, thin/thick films and laminated, graded and composite structures. Process related topics such as ceramic-ceramic joints or joining ceramics with dissimilar materials, as well as surface finishing and conditioning are also covered. Besides traditional processing techniques, manufacturing routes of interest include innovative procedures benefiting from externally applied stresses, electromagnetic fields and energetic beams, as well as top-down and self-assembly nanotechnology approaches. In addition, the journal welcomes submissions on bio-inspired and bio-enabled materials designs, experimentally validated multi scale modelling and simulation for materials design, and the use of the most advanced chemical and physical characterization techniques of structure, properties and behaviour. Technologically relevant low-dimensional systems are a particular focus of Ceramics International. These include 0, 1 and 2-D nanomaterials (also covering CNTs, graphene and related materials, and diamond-like carbons), their nanocomposites, as well as nano-hybrids and hierarchical multifunctional nanostructures that might integrate molecular, biological and electronic components.