Modeling of High-Sensitivity SAW Magnetic Field Sensors with Au-SiO2 Phononic Crystals

Mohsen Samadi, Jana Marie Meyer, Elizaveta Spetzler, Benjamin Spetzler, Jeffrey McCord, Fabian Lofink, Martina Gerken
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Abstract

The development of high-sensitivity magnetic field sensors is crucial for precise magnetic field detection. In this context, a theoretical model is presented for a highly sensitive surface acoustic wave (SAW) magnetic field sensor incorporating phononic crystal (PnC) structures composed of Au pillars embedded within a SiO2 guiding layer. Rectangular and triangular PnC configurations are studied and their potential for improving sensor performance are assessed. In the design, the PnC is integrated into the SiO2 guiding layer to preserve the continuous magnetostrictive layer, enhancing its interaction with the SAW. Results from the simulations indicate that the proposed sensor can achieve a nearly two orders of magnitude increase in sensitivity compared to a continuous delay line of similar dimensions, and an eightfold improvement over a previous sensor design with PnCs composed of magnetostrictive pillars. This improved performance is attributed to the enhanced interaction between the SAW and the continuous magnetostrictive layer, driven by resonance effects within the PnC. These findings highlight the significant potential of incorporating PnCs into SAW sensors for future high-performance magnetic field sensing.

Abstract Image

基于Au-SiO2声子晶体的高灵敏度SAW磁场传感器建模
研制高灵敏度磁场传感器是实现精确磁场检测的关键。在此背景下,提出了一种高灵敏度表面声波(SAW)磁场传感器的理论模型,该传感器将由金柱组成的声子晶体(PnC)结构嵌入SiO2导向层中。研究了矩形和三角形PnC结构,并评估了它们改善传感器性能的潜力。在设计中,PnC集成到SiO2导向层中,以保持连续的磁致伸缩层,增强其与SAW的相互作用。仿真结果表明,与相似尺寸的连续延迟线相比,该传感器的灵敏度提高了近两个数量级,比以前由磁致伸缩柱组成的pnc传感器设计提高了8倍。这种性能的提高是由于SAW和连续磁致伸缩层之间的相互作用增强,由PnC内部的共振效应驱动。这些发现突出了将pnc集成到SAW传感器中以实现未来高性能磁场传感的巨大潜力。
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