Phase Measurement Deflectometry With Concave Mirror-Assisted Clear Imaging

IF 5.6 2区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Instrumentation and Measurement Pub Date : 2025-04-25 DOI:10.1109/TIM.2025.3564022

Ziyu Li;Nan Gao;Zhaozong Meng;Zonghua Zhang;Yongjian Li

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引用次数: 0

Abstract

Phase measuring deflectometry (PMD) is usually used to measure the specular surface accurately. However, due to the limited depth of field (DOF) of the camera lens, the traditional PMD cannot image the specular surface under test (SUT) and the display clearly together. As a result, the pixel position extraction and linear tracking of the display during the system calibration process and the process of the gradient solution are fuzzy and the measurement stability is reduced. According to the principle of concave mirror paraxial reflection imaging, this article introduces a concave mirror into the PMD and proposes a new PMD based on concave mirror (CM-PMD)-assisted imaging. The system model, calibration, and reconstruction methods are studied. The accuracy and reliability of the proposed CM-PMD method are verified by quantitative comparison experiments with the traditional PMD method. The experimental results demonstrate that the proposed CM-PMD method can effectively reduce the image blur caused by the inherent DOF of the camera and improve the precision and depth range of specular measurement.

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凹镜辅助清晰成像的相位测量偏转计

相位测量偏转法（PMD）通常用于镜面的精确测量。然而，由于相机镜头的景深（DOF）有限，传统的PMD无法将被测镜面（SUT）和显示器一起清晰成像。因此，在系统标定过程和梯度求解过程中，显示器的像素位置提取和线性跟踪是模糊的，降低了测量的稳定性。根据凹面镜近轴反射成像原理，将凹面镜引入到PMD中，提出了一种基于凹面镜辅助成像的PMD。研究了系统的建模、标定和重建方法。通过与传统PMD方法的定量对比实验，验证了所提CM-PMD方法的准确性和可靠性。实验结果表明，所提出的CM-PMD方法可以有效地降低相机固有自由度引起的图像模糊，提高镜面测量的精度和深度范围。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Transactions on Instrumentation and Measurement 工程技术-工程：电子与电气

CiteScore

9.00

自引率

23.20%

发文量

1294

审稿时长

3.9 months

期刊介绍： Papers are sought that address innovative solutions to the development and use of electrical and electronic instruments and equipment to measure, monitor and/or record physical phenomena for the purpose of advancing measurement science, methods, functionality and applications. The scope of these papers may encompass: (1) theory, methodology, and practice of measurement; (2) design, development and evaluation of instrumentation and measurement systems and components used in generating, acquiring, conditioning and processing signals; (3) analysis, representation, display, and preservation of the information obtained from a set of measurements; and (4) scientific and technical support to establishment and maintenance of technical standards in the field of Instrumentation and Measurement.