Hysteresis compensation and decoupling control of a parallel XYΘ nanopositioning system in linear and angular coupled positioning

IF 7.9 1区工程技术 Q1 ENGINEERING, MECHANICAL

Mechanical Systems and Signal Processing Pub Date : 2025-05-05 DOI:10.1016/j.ymssp.2025.112794

Yanding Qin , Jie Yuan , Haitao Wu , Bijan Shirinzadeh , Jianda Han

{"title":"Hysteresis compensation and decoupling control of a parallel XYΘ nanopositioning system in linear and angular coupled positioning","authors":"Yanding Qin , Jie Yuan , Haitao Wu , Bijan Shirinzadeh , Jianda Han","doi":"10.1016/j.ymssp.2025.112794","DOIUrl":null,"url":null,"abstract":"<div><div>Piezoelectric actuator actuated XYΘ nanopositioning system can provide in-plane 3 degrees-of-freedom (DOFs) actuation for micro/nano manufacturing. The challenges in the positioning control of this multi–input–multi–output (MIMO) system include the hysteresis of the actuators, the input couplings, and the output couplings. In this paper, a decoupling generalized predictive controller is proposed to account for the above hysteresis and couplings. First, an inverse Prandtl-Ishlinskii model is used to construct the feedforward compensator. Consequently, the compensated system can be treated as a linear MIMO system with input and output couplings. Subsequently, for the compensated system, a MIMO controller is constructed using generalized predictive control. Multi-DOF positioning results demonstrate that the proposed controller can effectively improve the transient and steady-state positioning performance of the XYΘ nanopositioning system.</div></div>","PeriodicalId":51124,"journal":{"name":"Mechanical Systems and Signal Processing","volume":"234 ","pages":"Article 112794"},"PeriodicalIF":7.9000,"publicationDate":"2025-05-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Mechanical Systems and Signal Processing","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0888327025004959","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}

引用次数: 0

Abstract

Piezoelectric actuator actuated XYΘ nanopositioning system can provide in-plane 3 degrees-of-freedom (DOFs) actuation for micro/nano manufacturing. The challenges in the positioning control of this multi–input–multi–output (MIMO) system include the hysteresis of the actuators, the input couplings, and the output couplings. In this paper, a decoupling generalized predictive controller is proposed to account for the above hysteresis and couplings. First, an inverse Prandtl-Ishlinskii model is used to construct the feedforward compensator. Consequently, the compensated system can be treated as a linear MIMO system with input and output couplings. Subsequently, for the compensated system, a MIMO controller is constructed using generalized predictive control. Multi-DOF positioning results demonstrate that the proposed controller can effectively improve the transient and steady-state positioning performance of the XYΘ nanopositioning system.

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平行XYΘ纳米定位系统线性与角耦合定位的滞后补偿与解耦控制

压电驱动器驱动的XYΘ纳米定位系统可以为微纳米制造提供平面内3自由度的驱动。多输入-多输出（MIMO）系统定位控制面临的挑战包括执行器的滞后、输入耦合和输出耦合。本文提出了一种解耦广义预测控制器来解决上述滞后和耦合问题。首先，利用逆Prandtl-Ishlinskii模型构造前馈补偿器。因此，补偿后的系统可以看作是一个具有输入和输出耦合的线性MIMO系统。随后，针对补偿系统，采用广义预测控制构造了MIMO控制器。多自由度定位结果表明，该控制器能有效改善XYΘ纳米定位系统的瞬态和稳态定位性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Mechanical Systems and Signal Processing 工程技术-工程：机械

CiteScore

14.80

自引率

13.10%

发文量

1183

审稿时长

5.4 months

期刊介绍： Journal Name: Mechanical Systems and Signal Processing (MSSP) Interdisciplinary Focus: Mechanical, Aerospace, and Civil Engineering Purpose:Reporting scientific advancements of the highest quality Arising from new techniques in sensing, instrumentation, signal processing, modelling, and control of dynamic systems