Enhanced decoupling strategy for magnetic levitated planar motor using model calibration and disturbance observer

IF 5.4 2区计算机科学 Q1 AUTOMATION & CONTROL SYSTEMS

Control Engineering Practice Pub Date : 2025-05-05 DOI:10.1016/j.conengprac.2025.106369

Fuxiang Chen, Kai Liu, Xinpeng Wei, Aoqi Hu, Yingtong Wu, Xiaoqing Li, Lizhang Zeng

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引用次数: 0

Abstract

The magnetically levitated planar motor is a core component of ultraprecise motion stages in lithography manufacturing. Although the static decoupling is achieved through model-based commutation, the coupling control still exists because of the mismatch between ideal electromagnetic model and the physical system. To address this issue, this paper proposes a strategy to enhance decoupling through model calibration andDisturbance Observer. The calibration based on the deviation of the mass center of mover is introduced to minimize the mismatch of wrench model, which is then searched by an improved adaptive Gradient Descent algorithm. Furthermore, residual coupling is suppressed throughDisturbance Observer considering system delays, thereby achieving stable control and coupling attenuation over a broader bandwidth. Validated by simulations and experiments with a planar motor prototype, the proposed strategy effectively reduces the coupling surge by up to 79% in levitation control, making a significant contribution to the initialization and coupling rejection of planar motors.

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基于模型标定和扰动观测器的平面磁悬浮电机增强解耦策略

平面磁悬浮电机是光刻制造中超精密运动平台的核心部件。虽然通过基于模型的换相实现了静态解耦，但由于理想电磁模型与物理系统不匹配，耦合控制仍然存在。针对这一问题，本文提出了一种通过模型标定和扰动观测器增强解耦的策略。为了减小扳手模型的不匹配，引入了基于动器质心偏差的标定方法，然后采用改进的自适应梯度下降算法对扳手模型进行搜索。此外，通过考虑系统延迟的扰动观测器抑制残余耦合，从而在更宽的带宽上实现稳定的控制和耦合衰减。通过平面电机样机的仿真和实验验证，该策略有效地降低了悬浮控制中高达79%的耦合浪涌，为平面电机的初始化和耦合抑制做出了重要贡献。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Control Engineering Practice 工程技术-工程：电子与电气

CiteScore

9.20

自引率

12.20%

发文量

183

审稿时长

44 days

期刊介绍： Control Engineering Practice strives to meet the needs of industrial practitioners and industrially related academics and researchers. It publishes papers which illustrate the direct application of control theory and its supporting tools in all possible areas of automation. As a result, the journal only contains papers which can be considered to have made significant contributions to the application of advanced control techniques. It is normally expected that practical results should be included, but where simulation only studies are available, it is necessary to demonstrate that the simulation model is representative of a genuine application. Strictly theoretical papers will find a more appropriate home in Control Engineering Practice''s sister publication, Automatica. It is also expected that papers are innovative with respect to the state of the art and are sufficiently detailed for a reader to be able to duplicate the main results of the paper (supplementary material, including datasets, tables, code and any relevant interactive material can be made available and downloaded from the website). The benefits of the presented methods must be made very clear and the new techniques must be compared and contrasted with results obtained using existing methods. Moreover, a thorough analysis of failures that may happen in the design process and implementation can also be part of the paper. The scope of Control Engineering Practice matches the activities of IFAC. Papers demonstrating the contribution of automation and control in improving the performance, quality, productivity, sustainability, resource and energy efficiency, and the manageability of systems and processes for the benefit of mankind and are relevant to industrial practitioners are most welcome.