Amorphous boron nitride: synthesis, properties and device application

IF 13.4 2区材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY

Nano Convergence Pub Date : 2025-05-02 DOI:10.1186/s40580-025-00486-1

Seyed Mehdi Sattari-Esfahlan, Saeed Mirzaei, Mukkath Joseph Josline, Ji-Yun Moon, Sang-Hwa Hyun, Houk Jang, Jae-Hyun Lee

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Abstract

Amorphous boron nitride (a-BN) exhibits remarkable electrical, optical, and chemical properties, alongside robust mechanical stability, making it a compelling material for advanced applications in nanoelectronics and photonics. This review comprehensively examines the unique characteristics of a-BN, emphasizing its electrical and optical attributes, state-of-the-art synthesis techniques, and device applications. Key advancements in low-temperature growth methods for a-BN are highlighted, offering insights into their potential for integration into scalable, CMOS-compatible platforms. Additionally, the review discusses the emerging role of a-BN as a dielectric material in electronic and photonic devices, serving as substrates, encapsulation layers, and gate insulators. Finally, perspectives on future challenges, including defect control, interface engineering, and scalability, are presented, providing a roadmap for realizing the full potential of a-BN in next-generation device technologies.

Graphical Abstract

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非晶态氮化硼：合成、性能及器件应用

非晶态氮化硼（a- bn）具有卓越的电学、光学和化学性能，以及强大的机械稳定性，使其成为纳米电子学和光子学领域先进应用的引人注目的材料。这篇综述全面研究了a-BN的独特特性，强调了它的电学和光学特性，最先进的合成技术和器件应用。重点介绍了a-BN低温生长方法的关键进展，提供了对其集成到可扩展的cmos兼容平台的潜力的见解。此外，本文还讨论了氮化硼作为介电材料在电子和光子器件中的新兴作用，可作为衬底、封装层和栅极绝缘体。最后，展望了未来的挑战，包括缺陷控制、接口工程和可扩展性，为实现下一代设备技术中a- bn的全部潜力提供了路线图。图形抽象

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nano Convergence Engineering-General Engineering

CiteScore

15.90

自引率

2.60%

发文量

审稿时长

13 weeks

期刊介绍： Nano Convergence is an internationally recognized, peer-reviewed, and interdisciplinary journal designed to foster effective communication among scientists spanning diverse research areas closely aligned with nanoscience and nanotechnology. Dedicated to encouraging the convergence of technologies across the nano- to microscopic scale, the journal aims to unveil novel scientific domains and cultivate fresh research prospects. Operating on a single-blind peer-review system, Nano Convergence ensures transparency in the review process, with reviewers cognizant of authors' names and affiliations while maintaining anonymity in the feedback provided to authors.