Design of a Novel Vibration Sensor Based on Quartz MEMS Resonant Accelerometer

Abstract

To address the limitations of traditional vibration sensors in low-frequency response while ensuring a relatively wide bandwidth, this article proposes a resonant accelerometer based on a double-ended tuning fork (DETF) structure. The study focuses on the design, simulation, fabrication, and testing of the DETF-based resonant accelerometer. Optimized through design and simulation, the sensor demonstrates high sensitivity and stability, enabling it to adapt to various environmental conditions. Test results show that the accelerometer achieves a quality factor of approximately 19158.93 and a resonant frequency of 102.4813 kHz, confirming the effectiveness of its design. Dynamic and static tests reveal a sensitivity of 2.88 Hz/g, with excellent linearity in the range of 0–1 g. Furthermore, bandwidth tests indicate that the sensor maintains stable performance up to a frequency range of 3000 Hz while ensuring reliable low-frequency vibration measurements. This study provides a novel approach to advanced vibration monitoring, addressing key technical gaps in the field of vibration sensors.