A Resonant Pressure Sensor Based on Wedge-Shaped Comb Excitations

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2025-03-25 DOI:10.1109/JSEN.2025.3551534

Wei Jiang;Yulan Lu;Bo Xie;Deyong Chen;Junbo Wang;Jian Chen

{"title":"A Resonant Pressure Sensor Based on Wedge-Shaped Comb Excitations","authors":"Wei Jiang;Yulan Lu;Bo Xie;Deyong Chen;Junbo Wang;Jian Chen","doi":"10.1109/JSEN.2025.3551534","DOIUrl":null,"url":null,"abstract":"This article presents a resonant pressure sensor based on electrostatic wedge-shaped comb excitations to enhance driving capabilities. The dual double-ended tuning fork resonators detect pressure through frequency shifts caused by the deformation of the pressure-sensitive diaphragm under applied pressure. The developed wedge-shaped comb drive resonators outperformed parallel-plate resonators with higher quality factors (<italic>Q</i> values) and better resistance to electrostatic negative stiffness effects, while also surpassing flat-shaped comb drive resonators in driving capability and achieving higher signal-to-noise ratios (SNRs). The open-loop and closed-loop experiments demonstrated that the pressure sensor achieved a <italic>Q</i> value of 18000 and a differential pressure sensitivity of 70 Hz/kPa, enabling high-precision measurements with an accuracy of ±0.01% full scale (FS) within a wide measurement range (temperature range: <inline-formula> <tex-math>$- 30~^{\\circ }$ </tex-math></inline-formula>C to <inline-formula> <tex-math>$135~^{\\circ }$ </tex-math></inline-formula>C and pressure range: 5–350 kPa).","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 9","pages":"14822-14829"},"PeriodicalIF":4.3000,"publicationDate":"2025-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/10938003/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

Abstract

This article presents a resonant pressure sensor based on electrostatic wedge-shaped comb excitations to enhance driving capabilities. The dual double-ended tuning fork resonators detect pressure through frequency shifts caused by the deformation of the pressure-sensitive diaphragm under applied pressure. The developed wedge-shaped comb drive resonators outperformed parallel-plate resonators with higher quality factors (Q values) and better resistance to electrostatic negative stiffness effects, while also surpassing flat-shaped comb drive resonators in driving capability and achieving higher signal-to-noise ratios (SNRs). The open-loop and closed-loop experiments demonstrated that the pressure sensor achieved a Q value of 18000 and a differential pressure sensitivity of 70 Hz/kPa, enabling high-precision measurements with an accuracy of ±0.01% full scale (FS) within a wide measurement range (temperature range:

$- 30~^{\circ }$

C to

$135~^{\circ }$

C and pressure range: 5–350 kPa).

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基于楔形梳状激励的谐振压力传感器

本文提出了一种基于静电楔形梳子激励的谐振压力传感器，以提高其驱动能力。双双端音叉谐振器通过在施加压力下压敏膜片变形引起的频率变化来检测压力。所开发的楔形梳状驱动谐振器具有更高的品质因子（Q值）和更好的抗静电负刚度效应，同时在驱动能力和信噪比（SNRs）方面也优于扁平梳状驱动谐振器。开环和闭环实验表明，该压力传感器的Q值为18000，压差灵敏度为70 Hz/kPa，在较宽的测量范围内（温度范围：$- 30~^{\circ}$ C ~ $135~^{\circ}$ C，压力范围：5-350 kPa），可实现高精度测量，满量程精度为±0.01%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice