Optical properties of high entropy alloy CrNiTiSiZr films deposited by RF sputtering at different Ar working gas flows

IF 3.2 3区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Journal of Non-crystalline Solids Pub Date : 2025-05-02 DOI:10.1016/j.jnoncrysol.2025.123585

Jin-Cherng Hsu , Chia-Liang Chiang , Swe-Kai Chen , Yung-Shin Sun , Hsing-Yu Wu

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Abstract

In this study, HEA films of CrNiTiSiZr were fabricated using an RF sputtering system. The compositions and optical properties of these films, prepared under different argon pressures, were investigated. The samples were characterized using XRD, XPS, ellipsometry, and spectroscopy. Optical properties were analyzed and their band gaps were determined. XPS analysis revealed that the oxygen content in the films decreased as the argon flow rate decreased, but the XRD patterns did not change significantly. The HEAFs deposited at argon flow rates of 30–40 sccm exhibited the maximum variation in refractive index and extinction coefficient as the visible wavelength increased. When the film was deposited at 40 sccm, it exhibited the smallest energy gap and the lowest transmittance, indicating the highest metal content. These findings suggest that the present HEAFs could be applied in optical systems such as solar absorber coatings, optical filters, and mirrors.

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不同氩工作气流下射频溅射制备高熵合金CrNiTiSiZr薄膜的光学性质

在本研究中，采用射频溅射系统制备了CrNiTiSiZr的HEA薄膜。研究了在不同氩气压力下制备的薄膜的组成和光学性能。采用XRD、XPS、椭偏仪和光谱学对样品进行了表征。分析了其光学性质，确定了其带隙。XPS分析表明，随着氩气流量的减小，膜中的氧含量降低，但XRD谱图变化不明显。当氩气流量为30 ~ 40 sccm时，随着可见光波长的增加，其折射率和消光系数的变化最大。在40 sccm下沉积时，薄膜的能隙最小，透过率最低，金属含量最高。这些研究结果表明，该热聚光器可应用于太阳能吸收膜、滤光片和反射镜等光学系统。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Non-crystalline Solids 工程技术-材料科学：硅酸盐

CiteScore

6.50

自引率

11.40%

发文量

576

审稿时长

35 days

期刊介绍： The Journal of Non-Crystalline Solids publishes review articles, research papers, and Letters to the Editor on amorphous and glassy materials, including inorganic, organic, polymeric, hybrid and metallic systems. Papers on partially glassy materials, such as glass-ceramics and glass-matrix composites, and papers involving the liquid state are also included in so far as the properties of the liquid are relevant for the formation of the solid. In all cases the papers must demonstrate both novelty and importance to the field, by way of significant advances in understanding or application of non-crystalline solids; in the case of Letters, a compelling case must also be made for expedited handling.