The effect of the Connection of Linear Zones on their Transformation during Thermomigration through a Silicon Wafer (100)

IF 2.8 3区材料科学 Q3 CHEMISTRY, PHYSICAL

Silicon Pub Date : 2025-02-18 DOI:10.1007/s12633-025-03255-1

Boris M. Seredin, Victor P. Popov, Alexander V. Malibashev, Artem D. Stepchenko, Marina B. Zinenko

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Abstract

The transformation of closed linear zones in the process of thermomigration is associated with the difference in the conditions of dissolution of an anisotropic crystal on the outer and inner contours of the zone. The connection of linear zones changes the dissolution conditions on these contours and affects the shape of the zone and the resulting epitaxial channel. Using the example of the silicon-aluminum system, the effect of connecting a segment of a linear zone at right angles with zones of various shapes: circular, square and rectilinear on their transformation when passing through a silicon wafer (100) was experimentally studied. It was found that the adjacency from inside the closed zone does not affect its transformation, and the adjacency from the outside eliminates the characteristic transformation, ensures the migration of the zone in the direction of the temperature gradient and causes a possible rupture of the zone at the adjacency. For a rectilinear zone, the adjacency causes the zone to shift towards the adjacent segment. An explanation of the mechanism of the detected effect is given, based on taking into account the vector nature of the forces of resistance to movement in various sections of the dissolution front of the zone.

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硅晶片热迁移过程中线性区连接对其转变的影响（100）

热迁移过程中封闭线性区的转变与线性区内外轮廓上各向异性晶体溶解条件的差异有关。线性区域的连接改变了这些轮廓上的溶解条件，并影响了区域的形状和由此产生的外延通道。以硅铝体系为例，实验研究了将线性区的一段与不同形状的区（圆形、方形和直角形）以直角连接，对它们在通过硅晶片（100）时的转变产生的影响。实验发现，从封闭区内部相邻不会影响其转变，而从外部相邻则会消除特征转变，确保封闭区向温度梯度方向移动，并导致封闭区在相邻处破裂。对于直线区域，相邻段会导致区域向相邻段移动。考虑到熔带溶解前沿各段移动阻力的矢量性质，对检测到的效应机制进行了解释。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Silicon CHEMISTRY, PHYSICAL-MATERIALS SCIENCE, MULTIDISCIPLINARY

CiteScore

5.90

自引率

20.60%

发文量

685

审稿时长

>12 weeks

期刊介绍： The journal Silicon is intended to serve all those involved in studying the role of silicon as an enabling element in materials science. There are no restrictions on disciplinary boundaries provided the focus is on silicon-based materials or adds significantly to the understanding of such materials. Accordingly, such contributions are welcome in the areas of inorganic and organic chemistry, physics, biology, engineering, nanoscience, environmental science, electronics and optoelectronics, and modeling and theory. Relevant silicon-based materials include, but are not limited to, semiconductors, polymers, composites, ceramics, glasses, coatings, resins, composites, small molecules, and thin films.