Didier Chérubin Negretto , Jan ten Pierick , Luigi Ferraioli , Daniel Bieri , Pierrick Cheiney , Olivier Jolly , Domenico Giardini
{"title":"Resonance frequency measurement for space accelerometer","authors":"Didier Chérubin Negretto , Jan ten Pierick , Luigi Ferraioli , Daniel Bieri , Pierrick Cheiney , Olivier Jolly , Domenico Giardini","doi":"10.1016/j.sna.2025.116587","DOIUrl":null,"url":null,"abstract":"<div><div>Resonance frequency measurements are used for various applications: atomic force microscopes, mass detection, biochemical and inertial sensors. In this article a detailed analysis of the performances of a resonance frequency measurement method are presented and demonstrated using a space grade accelerometer. The method consists of replacing the feedback of the oscillator with a controller that drives the sensor’s input, acquires the sensor’s output, determines the phase shift between the sensor’s input and output, converts it to a resonance frequency measurement and adjusts the drive signal’s frequency. The innovative phase to frequency conversion model used ensures a fast convergence of the drive signal towards the resonance frequency. The maximum measured relative error while searching for the resonance frequency is of 0.04 [%]. The tracking of the resonance frequency shows no oscillations or overshoots because the resonance frequency is exactly measured. The achieved measurement noise floor for the specific sensor used is <span><math><mrow><mn>0</mn><mo>.</mo><mn>13</mn></mrow></math></span> [<span><math><mrow><mi>m</mi><mi>H</mi><mi>z</mi><mo>/</mo><msqrt><mi>H</mi><mi>z</mi></msqrt></mrow></math></span>] at <span><math><mrow><mn>1</mn><mspace></mspace><mfenced><mrow><mi>H</mi><mi>z</mi></mrow></mfenced></mrow></math></span>. The measurement method presented can be exploited for other applications which also rely on the measurement of the resonance frequency of a piezo-electric resonator.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"390 ","pages":"Article 116587"},"PeriodicalIF":4.1000,"publicationDate":"2025-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators A-physical","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924424725003930","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Resonance frequency measurements are used for various applications: atomic force microscopes, mass detection, biochemical and inertial sensors. In this article a detailed analysis of the performances of a resonance frequency measurement method are presented and demonstrated using a space grade accelerometer. The method consists of replacing the feedback of the oscillator with a controller that drives the sensor’s input, acquires the sensor’s output, determines the phase shift between the sensor’s input and output, converts it to a resonance frequency measurement and adjusts the drive signal’s frequency. The innovative phase to frequency conversion model used ensures a fast convergence of the drive signal towards the resonance frequency. The maximum measured relative error while searching for the resonance frequency is of 0.04 [%]. The tracking of the resonance frequency shows no oscillations or overshoots because the resonance frequency is exactly measured. The achieved measurement noise floor for the specific sensor used is [] at . The measurement method presented can be exploited for other applications which also rely on the measurement of the resonance frequency of a piezo-electric resonator.
期刊介绍:
Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas:
• Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results.
• Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon.
• Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays.
• Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers.
Etc...