An easily available and flexible fabrication protocol for microstructures by using printed mask projection lithography and silver mirror reaction

Abstract

Because of the expensive prices of machines and masks, the projection lithography was limited in many applications. Here, projection lithography with printed masks was systematically investigated, and it provided an easily available and low-cost lithography method. Trenches of diverse microstructures, such as square helix circuit microstructure and microelectrode array structure, were all fabricated in AZ 5214E photoresist film by using this lithography method. The fabricated microstructures in photoresist film were also transferred to silver microstructures by using silver mirror reaction. Silver microstructures with resistivity of 7.45 × 10⁻⁸ Ω·m were achieved. Functional microstructures of a catalytic reactor of micro pit array and a rectangular helix microheater were also fabricated by using this combined method. This work demonstrates a low-cost, easily available and flexible method for lithography of diverse microstructures, and fabrication of functional microstructures of MEMS, sensors, catalysts and metamaterials.