GHz Love-mode TF-SAW phononic crystals based on LiNbO3-on-SiC substrate

IF 3.6 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-04-21 DOI:10.1063/5.0254867

Yi-Han He, Zhen-Hui Qin, Hua-Yang Chen, Nan-Xin Yu, Zhi-Wen Wang, Si-Yuan Yu, Yan-Feng Chen

引用次数: 0

Abstract

We demonstrate thin-film surface acoustic wave (TF-SAW) phononic crystals (PnCs) by etching a square lattice array of micropores into a 300 nm LiNbO3-on-SiC substrate, harnessing the remarkable properties of Love modes. Our design enables tailorable bandgaps from 2.026 to 2.347 GHz (approximately 15% bandwidth) along Γ-X, extending up to 3.167 GHz along Γ-M, with experimental measurements confirming Love mode attenuation up to 40 dB. By precisely engineering the micropore geometry and layer configuration, we effectively tune both the position and width of the bandgaps. These TF-SAW PnCs offer powerful acoustic wave manipulation capabilities and scalability, opening horizons for high-throughput communication, sensing, microfluidics, and emerging quantum acoustics technologies.

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基于LiNbO3-on-SiC衬底的GHz Love-mode TF-SAW声子晶体

我们通过在300 nm的LiNbO3-on-SiC衬底上蚀刻方形晶格微孔阵列来展示薄膜表面声波声子晶体（PnCs），利用Love模式的显着特性。我们的设计实现了沿Γ-X从2.026至2.347 GHz（约15%带宽）的可定制带隙，沿Γ-M延伸至3.167 GHz，实验测量证实Love模式衰减高达40 dB。通过精确地设计微孔几何形状和层构型，我们有效地调整了带隙的位置和宽度。这些TF-SAW pnc提供强大的声波操作能力和可扩展性，为高通量通信，传感，微流体和新兴量子声学技术开辟了视野。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.