Electron Holography Characterization of Total Ionizing Dose Effects in Oxide–Nitride Stacks

IF 1.9 3区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Nuclear Science Pub Date : 2025-03-06 DOI:10.1109/TNS.2025.3548573

Ching-Tao Chang;Martha R. McCartney;David J. Smith;Keith E. Holbert;Esteban Chacon;Kiraneswar Muthuseenu;Hugh J. Barnaby

引用次数: 0

Abstract

In this work, an analysis of total ionizing dose (TID) effects in metal-nitride–oxide-semiconductors (MNOSs) was performed using electrical characterization and electron holography. Technology computer-aided design (TCAD) simulations were also performed to reproduce the holography findings. By matching the simulation results with electron holography data and capacitance-voltage (CV) measurement results, the distributions of holes and electrons in the nitride and oxide film are extracted. Close matching between the experimental data and simulation results establishes that charge buildup within the dielectric layers after irradiation can be directly imaged and quantified. Electron and hole trapping in the nitride layer near the SiO2/Si3N4 interface, identified using the holography measurements, is also shown to be consistent with models presented in previous studies.

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氧化氮堆中总电离剂量效应的电子全息表征

本文利用电学表征和电子全息技术分析了金属氮氧化物半导体（MNOSs）的总电离剂量（TID）效应。技术计算机辅助设计（TCAD）模拟也进行了再现全息结果。通过将模拟结果与电子全息数据和电容电压（CV）测量结果相匹配，提取了氮化膜和氧化膜中空穴和电子的分布。实验数据与模拟结果吻合较好，表明辐照后介电层内电荷积累可以直接成像和量化。利用全息测量发现，在SiO2/Si3N4界面附近的氮化物层中存在电子和空穴捕获，这也与先前研究中提出的模型一致。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Transactions on Nuclear Science 工程技术-工程：电子与电气

CiteScore

3.70

自引率

27.80%

发文量

314

审稿时长

6.2 months

期刊介绍： The IEEE Transactions on Nuclear Science is a publication of the IEEE Nuclear and Plasma Sciences Society. It is viewed as the primary source of technical information in many of the areas it covers. As judged by JCR impact factor, TNS consistently ranks in the top five journals in the category of Nuclear Science & Technology. It has one of the higher immediacy indices, indicating that the information it publishes is viewed as timely, and has a relatively long citation half-life, indicating that the published information also is viewed as valuable for a number of years. The IEEE Transactions on Nuclear Science is published bimonthly. Its scope includes all aspects of the theory and application of nuclear science and engineering. It focuses on instrumentation for the detection and measurement of ionizing radiation; particle accelerators and their controls; nuclear medicine and its application; effects of radiation on materials, components, and systems; reactor instrumentation and controls; and measurement of radiation in space.