On the design of a KNN piezoelectric MEMS resonant scanner for wide-angle and high-frequency scanning

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-04-19 DOI:10.1016/j.sna.2025.116586

Hung-Yu Lin , Hao-Chien Cheng , Mingching Wu , Mei-Feng Lai , Weileun Fang

{"title":"On the design of a KNN piezoelectric MEMS resonant scanner for wide-angle and high-frequency scanning","authors":"Hung-Yu Lin , Hao-Chien Cheng , Mingching Wu , Mei-Feng Lai , Weileun Fang","doi":"10.1016/j.sna.2025.116586","DOIUrl":null,"url":null,"abstract":"<div><div>This study designs and realizes a piezoelectric MEMS scanning mirror with large scan angle and high frequency for high-resolution laser beam scanning displays. In this design, the micro-mirror consists of mirror plate (1.2 mm in diameter), torsional springs, two pair of wing-shaped actuators, and supporting beams. The wing-shaped actuators acts as the pure torque generator to drive the torsional spring and mirror plate with good linearity (since no axial/transverse loads), also confining the energy at torsional-spring and mirror to achieve large scan angle (at the scanning mode). By varying the width of the supporting beam, mode coupling is suppressed, and the maximum stress on the beam during scanning is also reduced. Measurements demonstrate the scanner has an optical scan angle of 70-degree (mechanical scan angle of ± 17.5-degree) at the resonant frequency of 37.7 kHz with a unipolar driving voltage of 20 V. Moreover, no vacuum environment is required for the presented scanning mirror to achieve the above scan angle. In summary, compared with existing scanners, the performance of the presented one is competitive in FOM (optical scan angle (θ) × mirror size (D)) when driving at resonant frequency, which satisfies the requirement of 1080 P.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"390 ","pages":"Article 116586"},"PeriodicalIF":4.1000,"publicationDate":"2025-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators A-physical","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924424725003929","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

Abstract

This study designs and realizes a piezoelectric MEMS scanning mirror with large scan angle and high frequency for high-resolution laser beam scanning displays. In this design, the micro-mirror consists of mirror plate (1.2 mm in diameter), torsional springs, two pair of wing-shaped actuators, and supporting beams. The wing-shaped actuators acts as the pure torque generator to drive the torsional spring and mirror plate with good linearity (since no axial/transverse loads), also confining the energy at torsional-spring and mirror to achieve large scan angle (at the scanning mode). By varying the width of the supporting beam, mode coupling is suppressed, and the maximum stress on the beam during scanning is also reduced. Measurements demonstrate the scanner has an optical scan angle of 70-degree (mechanical scan angle of ± 17.5-degree) at the resonant frequency of 37.7 kHz with a unipolar driving voltage of 20 V. Moreover, no vacuum environment is required for the presented scanning mirror to achieve the above scan angle. In summary, compared with existing scanners, the performance of the presented one is competitive in FOM (optical scan angle (θ) × mirror size (D)) when driving at resonant frequency, which satisfies the requirement of 1080 P.

查看原文本刊更多论文

求助全文

约1分钟内获得全文求助全文

来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...