Enhanced Damage Resistance of Mo/Si Multilayer Mirror with Carbon Barrier Layers under Intense Nanosecond EUV Irradiation

IF 9.6 1区材料科学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Nano Letters Pub Date : 2025-04-17 DOI:10.1021/acs.nanolett.5c01457

Chao Yun, Shuhui Li, Yinzhuo Hu, Xiangyue Liu, Zhanglin Hu, Danqiao Xu, Zhe Zhang, Qiushi Huang, Wenbin Li, Zhanshan Wang

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Abstract

The enhancement of damage-resistance capabilities has long been pursued for the development of multilayer mirrors in the field of extreme ultraviolet lithography. Here, single-shot damage experiments were conducted on periodic Mo/Si and Mo/C/Si/C multilayers using nanosecond 13.5 nm EUV radiation. It is revealed that the incorporation of carbon barrier layers significantly enhances the single-shot damage threshold of Mo/Si by about 46%. The crater-like and bump-like damages caused by compaction and expansion are, respectively, observed for Mo/Si and Mo/C/Si/C multilayers. According to characterization results, different damage mechanisms for these two samples have been identified, which are the diffusion reaction for the Mo/Si multilayer and the nonuniform graphitization for the Mo/C/Si/C multilayer. The nonuniform graphitization mechanism is further illustrated by molecular dynamics simulations. Based on the measured multilayer structure, the optical properties of the damaged Mo/C/Si/C multilayer were evaluated at a fluence of 2.68 J/cm² and found to be maintained at a high level.

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具有碳势垒层的Mo/Si多层反射镜在纳秒级强EUV照射下的抗损伤性增强

在极紫外光刻领域，提高多层反射镜的抗损伤能力一直是其发展的追求。本文利用纳秒级13.5 nm EUV辐射对Mo/Si和Mo/C/Si/C周期多层膜进行了单次损伤实验。结果表明，碳阻挡层的加入使Mo/Si的单次损伤阈值提高了约46%。Mo/Si多层膜和Mo/C/Si/C多层膜的压实损伤和膨胀损伤分别表现为坑状和凹凸状。根据表征结果，确定了两种样品的不同损伤机制，分别是Mo/Si多层膜的扩散反应和Mo/C/Si/C多层膜的非均匀石墨化。通过分子动力学模拟进一步阐明了非均匀石墨化机理。基于测量的多层结构，在2.68 J/cm2的影响下，对Mo/C/Si/C多层膜的光学性能进行了评价，发现其光学性能保持在较高水平。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nano Letters 工程技术-材料科学：综合

CiteScore

16.80

自引率

2.80%

发文量

1182

审稿时长

1.4 months

期刊介绍： Nano Letters serves as a dynamic platform for promptly disseminating original results in fundamental, applied, and emerging research across all facets of nanoscience and nanotechnology. A pivotal criterion for inclusion within Nano Letters is the convergence of at least two different areas or disciplines, ensuring a rich interdisciplinary scope. The journal is dedicated to fostering exploration in diverse areas, including: - Experimental and theoretical findings on physical, chemical, and biological phenomena at the nanoscale - Synthesis, characterization, and processing of organic, inorganic, polymer, and hybrid nanomaterials through physical, chemical, and biological methodologies - Modeling and simulation of synthetic, assembly, and interaction processes - Realization of integrated nanostructures and nano-engineered devices exhibiting advanced performance - Applications of nanoscale materials in living and environmental systems Nano Letters is committed to advancing and showcasing groundbreaking research that intersects various domains, fostering innovation and collaboration in the ever-evolving field of nanoscience and nanotechnology.