Effect of ALD temperature on the polarization switching dynamics of BEOL-compatible Hf0.5Zr0.5O2 ferroelectric film

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-04-14 DOI:10.1063/5.0253330

Xiaopeng Li, Lu Tai, Xiaoyu Dou, Pengpeng Sang, Xuepeng Zhan, Jixuan Wu, Wei Wei, Jiezhi Chen

引用次数: 0

Abstract

HfO2-based ferroelectric materials offer a promising alternative for next-generation memory technology. Atomic layer deposition (ALD) temperature can significantly influence the physical and chemical properties of films, enabling compatibility with back-end-of-line (BEOL) thermal budgets; however, it also inevitably affects polarization switching dynamics, warranting further investigation. In this work, BEOL-compatible Hf0.5Zr0.5O2 (HZO) films are fabricated at various ALD temperatures, and their polarization switching dynamics is characterized using the nucleation-limited switching model. Higher ALD temperatures result in faster polarization switching speeds and reduced asymmetry during program and erase stages, while lower ALD temperatures promote uniform polarization, although capacitors across all temperatures display similar remnant polarization (Pr) values after wakeup. Detailed analysis suggests that the influence of ALD temperature on preexisting oxygen vacancies (Vo) may be the underlying factor.

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ALD 温度对 BEOL 兼容型 Hf0.5Zr0.5O2 铁电薄膜极化切换动力学的影响

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.