Design and implementation of a highly sensitive MEMS vector hydrophone based on resonance effect

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-04-10 DOI:10.1016/j.sna.2025.116556

Jiangjiang Wang, Guojun Zhang, Jie Zhang, Yanan Geng, Xiangzheng Kong, Yabo Zhang, Zimeng Guo, Wenqing Zhang, Yuhui Zhang, Tianzuo Wei, Li Jia, Wendong Zhang

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引用次数: 0

Abstract

In recent years, underwater target stealth technology has been progressed, bringing significant challenges to hydroacoustic detection technology. Aiming at the problem of difficulty in achieving weak target detection with the current hydrophone, this paper presents the resonance structure of a Micro-Electro-Mechanical-System (MEMS) vector hydrophone. The sensitive unit of the hydrophone is sealed inside the sound-transparent cap encapsulation structure, relying on the cilium-sensitive structure to perceive the sound-coupled in from the external environment, and using the resonance effect to make the hydrophone have a higher sensitivity near the resonance frequency. The influence of the main structural parameters of the sensitive unit and the sound-transparent cap on the resonant frequency of the hydrophone was analyzed, and the specific dimensions of the cilium microstructure and the sound-transparent cap were determined. The simulation results show that the sensitivity is increased by 32 dB@500 Hz compared with that of the non-resonant state. The design experiments verified are the same as the simulation results. The experimental results show that the resonant coupling of different frequencies can be realized by adjusting the geometry of the cilium and choosing a suitable sound-transparent cap structure, which lays a certain foundation for the realization of long-distance detection of targets.

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近年来，水下目标隐身技术不断进步，给水声探测技术带来了巨大挑战。针对目前水听器难以实现弱目标探测的问题，本文提出了一种微机电系统（MEMS）矢量水听器的共振结构。水听器的敏感单元被密封在透声帽封装结构内，依靠纤毛敏感结构感知来自外部环境的声耦合，并利用共振效应使水听器在共振频率附近具有更高的灵敏度。分析了敏感单元和透声帽的主要结构参数对水听器谐振频率的影响，确定了纤毛微结构和透声帽的具体尺寸。模拟结果表明，与非谐振状态相比，灵敏度提高了 32 dB@500 Hz。设计实验验证的结果与模拟结果相同。实验结果表明，通过调整纤毛的几何形状和选择合适的透声帽结构，可以实现不同频率的共振耦合，为实现对目标的远距离探测奠定了一定的基础。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...