Controlling Thermal Conductivity of Amorphous SiOx Films through Structural Engineering Utilizing Single Crystal Substrate Surfaces

IF 9.6 1区材料科学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Nano Letters Pub Date : 2025-04-14 DOI:10.1021/acs.nanolett.5c00646

Katelyn A. Kirchner, Sohei Ogasawara, Melbert Jeem, Hiromichi Ohta, Akihiro Suzuki, Hiroo Tajiri, Tomoyuki Koganezawa, Loku Singgappulige Rosantha Kumara, Junji Nishii, John C. Mauro, Yasutaka Matsuo, Madoka Ono

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引用次数: 0

Abstract

Development of thin films with low thermal conductivity (κ) and high dielectric breakdown strength is essential to engineer insulating materials for electronics packaging and other application domains, such as power electronics. Silica glass (SiO₂) has extremely high dielectric breakdown strength but a relatively high κ compared to multicomponent silicate glasses. This study reveals that a large and systematic decrease in κ can be obtained by shorter intermediate ordering distances controlled by stronger constraints from the substrate surface atoms. The largest effect on κ is observed for SiO_x films on Si substrates, which can reach one-third of the bulk value. The change in ordering is observable by the shift of the main halo measured by grazing incidence X-ray total scattering. The improved understanding of the κ of SiO_x films presented herein could enable new materials design for electronic devices including wide-bandgap semiconductors.

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利用单晶衬底表面的结构工程控制非晶SiOx薄膜的导热性

开发具有低导热系数（κ）和高介电击穿强度的薄膜对于设计电子封装和其他应用领域（如电力电子）的绝缘材料至关重要。硅玻璃（SiO2）具有极高的介电击穿强度，但与多组分硅酸盐玻璃相比，其κ值相对较高。这项研究表明，通过衬底表面原子的更强约束来控制较短的中间有序距离，可以获得较大的系统性κ降低。在Si衬底上的SiOx薄膜对κ的影响最大，可以达到体积值的三分之一。通过掠入射x射线全散射测量主光晕的位移，可以观察到这种顺序的变化。本文提出的对SiOx薄膜κ的改进理解可以为包括宽带隙半导体在内的电子器件设计新材料。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nano Letters 工程技术-材料科学：综合

CiteScore

16.80

自引率

2.80%

发文量

1182

审稿时长

1.4 months

期刊介绍： Nano Letters serves as a dynamic platform for promptly disseminating original results in fundamental, applied, and emerging research across all facets of nanoscience and nanotechnology. A pivotal criterion for inclusion within Nano Letters is the convergence of at least two different areas or disciplines, ensuring a rich interdisciplinary scope. The journal is dedicated to fostering exploration in diverse areas, including: - Experimental and theoretical findings on physical, chemical, and biological phenomena at the nanoscale - Synthesis, characterization, and processing of organic, inorganic, polymer, and hybrid nanomaterials through physical, chemical, and biological methodologies - Modeling and simulation of synthetic, assembly, and interaction processes - Realization of integrated nanostructures and nano-engineered devices exhibiting advanced performance - Applications of nanoscale materials in living and environmental systems Nano Letters is committed to advancing and showcasing groundbreaking research that intersects various domains, fostering innovation and collaboration in the ever-evolving field of nanoscience and nanotechnology.