Effects of silicon content on the characterization of (CrTaWSi)Nx thin films

IF 5.3 2区材料科学 Q1 MATERIALS SCIENCE, COATINGS & FILMS

Surface & Coatings Technology Pub Date : 2025-04-10 DOI:10.1016/j.surfcoat.2025.132154

Li-Zhu Wang , Li-Chun Chang , Yung-I Chen

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Abstract

(CrTaWSi)N_x films with 0–15.8 at.%Si were fabricated through magnetron cosputtering. The influences of Si content on the structural, mechanical, tribological, and antioxidative properties of (CrTaWSi)N_x films were evaluated. The films grew a face-centered cubic phase and amorphous structure as the Si content was <6.4 at.% and >12.5 at.%, respectively. The crystalline (CrTaWSi)N_x film with 6.4 at.%Si had the highest hardness and elastic modulus of 30.5 and 304 GPa, respectively. In contrast, the mechanical properties of the amorphous (CrTaWSi)N_x films were at low levels. Moreover, the films with higher hardness were ascribed to the nanocomposite formation, accompanied by higher wear resistance and lower coefficient of friction. The (Cr_0.31Ta_0.10W_0.31Si_0.28)N_0.76 films with 15.8 at.%Si maintained an amorphous structure after annealing at 600 °C up to 24 h in the air accompanied by a surficial oxide layer restricting further oxidation.

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来源期刊

Surface & Coatings Technology 工程技术-材料科学：膜

CiteScore

10.00

自引率

11.10%

发文量

921

审稿时长

19 days

期刊介绍： Surface and Coatings Technology is an international archival journal publishing scientific papers on significant developments in surface and interface engineering to modify and improve the surface properties of materials for protection in demanding contact conditions or aggressive environments, or for enhanced functional performance. Contributions range from original scientific articles concerned with fundamental and applied aspects of research or direct applications of metallic, inorganic, organic and composite coatings, to invited reviews of current technology in specific areas. Papers submitted to this journal are expected to be in line with the following aspects in processes, and properties/performance: A. Processes: Physical and chemical vapour deposition techniques, thermal and plasma spraying, surface modification by directed energy techniques such as ion, electron and laser beams, thermo-chemical treatment, wet chemical and electrochemical processes such as plating, sol-gel coating, anodization, plasma electrolytic oxidation, etc., but excluding painting. B. Properties/performance: friction performance, wear resistance (e.g., abrasion, erosion, fretting, etc), corrosion and oxidation resistance, thermal protection, diffusion resistance, hydrophilicity/hydrophobicity, and properties relevant to smart materials behaviour and enhanced multifunctional performance for environmental, energy and medical applications, but excluding device aspects.