Structural and optical properties of Ga2O3 nanorod arrays sputtered using AAO templates

IF 2.7 4区材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY

Materials Letters Pub Date : 2025-04-10 DOI:10.1016/j.matlet.2025.138568

Yingxi Li , Lei Feng , Jun Zhu , Hai Zhang , Sihua Ha , Kexiong Zhang

引用次数: 0

Abstract

Ga₂O₃ nanorod arrays were prepared by radio frequency magnetron sputtering through an anodic aluminum oxide template with pore size of 360 nm at room temperature. The surface morphology as well as elemental composition and chemical states were analyzed by scanning electron microscope and X-ray photoelectron measurements. With increasing sputtering time, the nanorod height increases but some irregular structures like voids and defects can be found in the prepared nanorod arrays. The UV–Vis spectra show that the average UV transmittance of the nanorod arrays was beyond 65 %. Hence, the AAO template-assisted thin film deposition presented in this research can be considered as a potential method for further fabrication of UV light detectors and gas sensors.

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用AAO模板溅射制备Ga2O3纳米棒阵列的结构和光学性质

采用射频磁控溅射法制备了孔径为360 nm的阳极氧化铝模板，制备了Ga2O3纳米棒阵列。通过扫描电镜和x射线光电子测量分析了表面形貌、元素组成和化学状态。随着溅射时间的增加，纳米棒的高度增加，但在制备的纳米棒阵列中会出现空洞和缺陷等不规则结构。紫外可见光谱表明，纳米棒阵列的平均紫外透过率超过65%。因此，本研究中提出的AAO模板辅助薄膜沉积可以被认为是进一步制造紫外线探测器和气体传感器的潜在方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Materials Letters 工程技术-材料科学：综合

CiteScore

5.60

自引率

3.30%

发文量

1948

审稿时长

50 days

期刊介绍： Materials Letters has an open access mirror journal Materials Letters: X, sharing the same aims and scope, editorial team, submission system and rigorous peer review. Materials Letters is dedicated to publishing novel, cutting edge reports of broad interest to the materials community. The journal provides a forum for materials scientists and engineers, physicists, and chemists to rapidly communicate on the most important topics in the field of materials. Contributions include, but are not limited to, a variety of topics such as: • Materials - Metals and alloys, amorphous solids, ceramics, composites, polymers, semiconductors • Applications - Structural, opto-electronic, magnetic, medical, MEMS, sensors, smart • Characterization - Analytical, microscopy, scanning probes, nanoscopic, optical, electrical, magnetic, acoustic, spectroscopic, diffraction • Novel Materials - Micro and nanostructures (nanowires, nanotubes, nanoparticles), nanocomposites, thin films, superlattices, quantum dots. • Processing - Crystal growth, thin film processing, sol-gel processing, mechanical processing, assembly, nanocrystalline processing. • Properties - Mechanical, magnetic, optical, electrical, ferroelectric, thermal, interfacial, transport, thermodynamic • Synthesis - Quenching, solid state, solidification, solution synthesis, vapor deposition, high pressure, explosive