Optimizing electrostatic chuck performance through ZrO₂/Al₂O₃ ratio and doping components (SiO₂ and Y₂O₃)

IF 5.1 2区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Ceramics International Pub Date : 2025-04-01 DOI:10.1016/j.ceramint.2024.12.562

Jongwoo Lim , Dahoon Kim , Nam Hui Lee , Young Gon Kim , Hak Ki Yu , Jae-Young Choi , Jae-Hyuk Park

{"title":"Optimizing electrostatic chuck performance through ZrO₂/Al₂O₃ ratio and doping components (SiO₂ and Y₂O₃)","authors":"Jongwoo Lim , Dahoon Kim , Nam Hui Lee , Young Gon Kim , Hak Ki Yu , Jae-Young Choi , Jae-Hyuk Park","doi":"10.1016/j.ceramint.2024.12.562","DOIUrl":null,"url":null,"abstract":"<div><div>This study explores the enhancement of electrostatic chuck (ESC) performance through the modulation of the ZrO₂/Al₂O₃ ratio, with additional doping of Y₂O₃ and SiO₂, deposited via Atmospheric Plasma Spraying (APS). Three different ZrO₂/Al₂O₃ mixed powders, further doped with Y₂O₃ and SiO₂, were prepared and analyzed for their electrical and mechanical properties. By utilizing APS to deposit these coatings, we achieved uniform and crack-free layers with controlled thickness and consistent mechanical properties. Notably, the mixed powder with the highest ZrO₂ content achieved a relative dielectric constant of about 22 with a volume resistivity of ∼1.0 × 10<sup>1</sup>⁴ Ωcm. The enhanced dielectric constant and reduced resistivity induced the Johnsen-Rahbek (J-R) effect, leading to an improved clamping force 25 gf/cm<sup>2</sup> on glass substrate, exceeding the industrial requirement of 10∼15 gf/cm<sup>2</sup>. Additionally, this ZrO₂/Al₂O₃ composition demonstrated a breakdown voltage of approximately 4200 V and a dielectric strength of about 17 V/μm, showcasing better voltage stability compared to traditional TiO₂-doped Al₂O₃. The high breakdown strength and excellent adhesion force suggest that ZrO₂-Al₂O₃ coatings, along with Y₂O₃ and SiO₂ doping, offer superior performance and reliability, making them viable alternatives to traditional TiO₂-doped Al₂O₃ chucks in advanced semiconductor manufacturing applications.</div></div>","PeriodicalId":267,"journal":{"name":"Ceramics International","volume":"51 9","pages":"Pages 11432-11436"},"PeriodicalIF":5.1000,"publicationDate":"2025-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Ceramics International","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0272884224062370","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MATERIALS SCIENCE, CERAMICS","Score":null,"Total":0}

引用次数: 0

Abstract

This study explores the enhancement of electrostatic chuck (ESC) performance through the modulation of the ZrO₂/Al₂O₃ ratio, with additional doping of Y₂O₃ and SiO₂, deposited via Atmospheric Plasma Spraying (APS). Three different ZrO₂/Al₂O₃ mixed powders, further doped with Y₂O₃ and SiO₂, were prepared and analyzed for their electrical and mechanical properties. By utilizing APS to deposit these coatings, we achieved uniform and crack-free layers with controlled thickness and consistent mechanical properties. Notably, the mixed powder with the highest ZrO₂ content achieved a relative dielectric constant of about 22 with a volume resistivity of ∼1.0 × 10¹⁴ Ωcm. The enhanced dielectric constant and reduced resistivity induced the Johnsen-Rahbek (J-R) effect, leading to an improved clamping force 25 gf/cm² on glass substrate, exceeding the industrial requirement of 10∼15 gf/cm². Additionally, this ZrO₂/Al₂O₃ composition demonstrated a breakdown voltage of approximately 4200 V and a dielectric strength of about 17 V/μm, showcasing better voltage stability compared to traditional TiO₂-doped Al₂O₃. The high breakdown strength and excellent adhesion force suggest that ZrO₂-Al₂O₃ coatings, along with Y₂O₃ and SiO₂ doping, offer superior performance and reliability, making them viable alternatives to traditional TiO₂-doped Al₂O₃ chucks in advanced semiconductor manufacturing applications.

查看原文本刊更多论文

通过ZrO₂/Al₂O₃比例和掺杂成分（SiO₂和Y₂O₃）优化静电吸盘性能

该研究探索了通过大气等离子体喷涂（APS）沉积的Y₂O₃和SiO₂，通过调制ZrO₂/Al₂O₃的比例来提高静电吸盘（ESC）的性能。制备了三种不同的ZrO₂/Al₂O₃混合粉末，并进一步掺杂了Y₂O₃和SiO₂，对其电学和力学性能进行了分析。通过使用APS沉积这些涂层，我们获得了均匀无裂纹的涂层，厚度可控，机械性能一致。值得注意的是，ZrO₂含量最高的混合粉末的相对介电常数约为22，体积电阻率为~ 1.0 × 101⁴Ωcm。介电常数的提高和电阻率的降低引起了johnson - rahbek （J-R）效应，导致玻璃基板上的夹紧力提高了25 gf/cm2，超过了工业要求的10 ~ 15 gf/cm2。此外，这种ZrO₂/Al₂O₃组合物的击穿电压约为4200 V，介电强度约为17 V/μm，与传统的掺杂TiO₂的Al₂O₃相比，具有更好的电压稳定性。高击穿强度和优异的附合力表明，ZrO₂-Al₂O₃涂层，以及Y₂O₃和SiO₂掺杂，提供了卓越的性能和可靠性，使它们成为先进半导体制造应用中传统的掺杂TiO₂的Al₂O₃卡盘的可行替代品。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Ceramics International 工程技术-材料科学：硅酸盐

CiteScore

9.40

自引率

15.40%

发文量

4558

审稿时长

25 days

期刊介绍： Ceramics International covers the science of advanced ceramic materials. The journal encourages contributions that demonstrate how an understanding of the basic chemical and physical phenomena may direct materials design and stimulate ideas for new or improved processing techniques, in order to obtain materials with desired structural features and properties. Ceramics International covers oxide and non-oxide ceramics, functional glasses, glass ceramics, amorphous inorganic non-metallic materials (and their combinations with metal and organic materials), in the form of particulates, dense or porous bodies, thin/thick films and laminated, graded and composite structures. Process related topics such as ceramic-ceramic joints or joining ceramics with dissimilar materials, as well as surface finishing and conditioning are also covered. Besides traditional processing techniques, manufacturing routes of interest include innovative procedures benefiting from externally applied stresses, electromagnetic fields and energetic beams, as well as top-down and self-assembly nanotechnology approaches. In addition, the journal welcomes submissions on bio-inspired and bio-enabled materials designs, experimentally validated multi scale modelling and simulation for materials design, and the use of the most advanced chemical and physical characterization techniques of structure, properties and behaviour. Technologically relevant low-dimensional systems are a particular focus of Ceramics International. These include 0, 1 and 2-D nanomaterials (also covering CNTs, graphene and related materials, and diamond-like carbons), their nanocomposites, as well as nano-hybrids and hierarchical multifunctional nanostructures that might integrate molecular, biological and electronic components.