Developing HZO-Based Superlattices to Enhance Fatigue-Resistance by Charge Injection Suppression

IF 18.5 1区材料科学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Advanced Functional Materials Pub Date : 2025-04-08 DOI:10.1002/adfm.202501470

Shijie Jia, Jiajia Liao, Qiong Yang, Renci Peng, Junhui Wang, Fei Yan, Shubin Wen, Zhipeng Wang, Jin Huang, Keyu Bao, Xuanling Liu, Min Liao, Jie Jiang, Yichun Zhou

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Abstract

The HfO₂-based ferroelectric thin films exhibit strong scalability and compatibility with complementary metal-oxide-semiconductor technology, rapidly promoting the development of ferroelectric memories. However, the inevitable breakdown-associated fatigue failure caused by charge injection poses a serious limitation on high-reliable HfO₂-based ferroelectric memories. By constructing an HZO-ZrO₂ ferroelectric superlattice to achieve fast switching and a low depolarization field, both the duration and intensity of charge injection are reduced during polarization switching. Thus, the charge injection effect during polarization switching is effectively suppressed, resulting in the enhanced endurance of over 10¹² cycles. Furthermore, the semi-quantitative calculation method is constructed to evaluate the influence of charge injection on endurance performance. This work provides a strategy and perspective to achieve fatigue-resistance HfO₂-based ferroelectric memories.

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利用电荷注入抑制制备hzo基超晶格以增强抗疲劳性能

hfo2基铁电薄膜具有很强的可扩展性和与互补金属氧化物半导体技术的兼容性，迅速促进了铁电存储器的发展。然而，电荷注入引起的不可避免的击穿相关疲劳失效严重限制了高可靠性hfo2基铁电存储器的发展。通过构建HZO-ZrO2铁电超晶格实现快速开关和低退极化场，降低了极化开关过程中电荷注入的持续时间和强度。因此，极化开关过程中的电荷注入效应被有效抑制，从而提高了超过1012次循环的续航能力。在此基础上，构建了半定量计算方法来评价充能对续航性能的影响。这项工作为实现基于hfo2的耐疲劳铁电存储器提供了一种策略和视角。

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来源期刊

Advanced Functional Materials 工程技术-材料科学：综合

CiteScore

29.50

自引率

4.20%

发文量

2086

审稿时长

2.1 months

期刊介绍： Firmly established as a top-tier materials science journal, Advanced Functional Materials reports breakthrough research in all aspects of materials science, including nanotechnology, chemistry, physics, and biology every week. Advanced Functional Materials is known for its rapid and fair peer review, quality content, and high impact, making it the first choice of the international materials science community.