Buffer-Layer-Free Semitransparent Perovskite Solar Cells with Soft Sputtered Electrodes Optimized via Design of Experiments

Abstract

Semitransparent p-i-n perovskite solar cells (ST-PSCs) hold great potential for multijunction and building-integrated photovoltaics. However, depositing transparent top electrodes, such as indium tin oxide (ITO), using magnetron sputtering often requires buffer layers to prevent sputter-induced damage. This study presents a Design of Experiment approach to implement a fast ITO deposition optimization, enabling the fabrication of buffer-layer-free ST-PSCs with losses in power conversion efficiency (PCE) of less than 0.5% compared to the PSCs using metal electrodes. The developed process is transferable to different ST-PSCs incorporating perovskite of various compositions and fabrication techniques, demonstrating scalability and industrial viability for next-generation ST-PSC technologies.