Highly efficient medium vacuum UV-assisted polishing of diamond via C-C bond breakage stimulated graphitization

IF 6.1 1区工程技术 Q1 ENGINEERING, MECHANICAL

Tribology International Pub Date : 2025-04-07 DOI:10.1016/j.triboint.2025.110702

Nian Liu , Haoran Wang , Ling Lei , Huilong Jiang , Yongjie Zhang , Junfeng Xiao , Jianguo Zhang , Xiao Chen , Jianfeng Xu

引用次数: 0

Abstract

Experiments and molecular dynamics (MD) simulations are combined to study the newly developed medium vacuum ultraviolet (UV)-assisted polishing (MV-UVAP) for diamond. The material removal rate (MRR) reaches over 7.0 μm/h and it is mainly determined by the diamond graphitization rate. The damage-free characteristic is confirmed by Raman and TEM measurement. MD simulation reveals the removal mechanism in MV-UVAP from an atomistic aspect. With synergic action of UV energy, O radical oxidation, and drawing force of Si-O-C bonds, lots of C atoms get removed from diamond. As large amounts of C-C bonds get rupture among this atom by atom removal process, the diamond structure is reconstructed into graphite, which is key for achieving high MRR without generating damage layers.

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通过C-C键断裂刺激石墨化的高效介质真空紫外辅助抛光金刚石

将实验与分子动力学（MD）模拟相结合，对新开发的中真空紫外（UV）辅助金刚石抛光（MV-UVAP）进行了研究。材料去除率（MRR）达到7.0 μm/h以上，主要由金刚石石墨化速率决定。通过拉曼光谱和透射电镜测量证实了材料的无损伤特性。MD模拟从原子的角度揭示了MV-UVAP的去除机制。在UV能量、O自由基氧化和Si-O-C键的拉拔力的协同作用下，金刚石中大量的C原子被去除。由于原子去原子过程中大量的C-C键断裂，金刚石结构被重构为石墨，这是实现高MRR而不产生损伤层的关键。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Tribology International 工程技术-工程：机械

CiteScore

10.10

自引率

16.10%

发文量

627

审稿时长

35 days

期刊介绍： Tribology is the science of rubbing surfaces and contributes to every facet of our everyday life, from live cell friction to engine lubrication and seismology. As such tribology is truly multidisciplinary and this extraordinary breadth of scientific interest is reflected in the scope of Tribology International. Tribology International seeks to publish original research papers of the highest scientific quality to provide an archival resource for scientists from all backgrounds. Written contributions are invited reporting experimental and modelling studies both in established areas of tribology and emerging fields. Scientific topics include the physics or chemistry of tribo-surfaces, bio-tribology, surface engineering and materials, contact mechanics, nano-tribology, lubricants and hydrodynamic lubrication.