ZnO:(B, Ga)/Au electrodes for improved Ohmic contacts on ultrawide-bandgap Ga2O3 films

IF 5.3 2区材料科学 Q1 MATERIALS SCIENCE, COATINGS & FILMS

Surface & Coatings Technology Pub Date : 2025-04-03 DOI:10.1016/j.surfcoat.2025.132127

Haofei Huang , Hengzhi Xing , Wei Zhang , Shilin Wang , Ke Tang , Lujun Wang , Lulu Wang , Zhichao Qian , Jian Huang , Linjun Wang

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Abstract

Gallium oxide (Ga₂O₃) is an ultrawide-bandgap semiconductor material known for its high breakdown field strength, large Baliga's figure of merit, and significant thermal and chemical stability, making it suitable for advanced technological applications. In this paper, Ga₂O₃ films were prepared using radio-frequency (RF) magnetron sputtering. B and Ga co-doped ZnO (BGZO)/Au composite electrodes were developed to achieve improved Ohmic contact characteristics with Ga₂O₃ films, comparing these results with those of widely used Ti/Au electrodes. The specific contact resistance of the electrodes was quantitatively measured using the dot circular transmission line model (d-CTLM) method. The results indicate that the presence of BGZO intermediate semiconductor layers (ISL) with appropriate thickness effectively reduces the specific contact resistance between the electrode and the Ga₂O₃ film, and the minimum specific contact resistance value is 1.049 × 10⁻² Ω·cm². This research provides critical insights into optimizing electrode to enhance the performance and reliability of Ga₂O₃-based devices.

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来源期刊

Surface & Coatings Technology 工程技术-材料科学：膜

CiteScore

10.00

自引率

11.10%

发文量

921

审稿时长

19 days

期刊介绍： Surface and Coatings Technology is an international archival journal publishing scientific papers on significant developments in surface and interface engineering to modify and improve the surface properties of materials for protection in demanding contact conditions or aggressive environments, or for enhanced functional performance. Contributions range from original scientific articles concerned with fundamental and applied aspects of research or direct applications of metallic, inorganic, organic and composite coatings, to invited reviews of current technology in specific areas. Papers submitted to this journal are expected to be in line with the following aspects in processes, and properties/performance: A. Processes: Physical and chemical vapour deposition techniques, thermal and plasma spraying, surface modification by directed energy techniques such as ion, electron and laser beams, thermo-chemical treatment, wet chemical and electrochemical processes such as plating, sol-gel coating, anodization, plasma electrolytic oxidation, etc., but excluding painting. B. Properties/performance: friction performance, wear resistance (e.g., abrasion, erosion, fretting, etc), corrosion and oxidation resistance, thermal protection, diffusion resistance, hydrophilicity/hydrophobicity, and properties relevant to smart materials behaviour and enhanced multifunctional performance for environmental, energy and medical applications, but excluding device aspects.