Fast Response and Low-Noise Optical Pressure Measurements Based on Squeeze-Film Damping Effect

IF 5.6 2区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Instrumentation and Measurement Pub Date : 2025-03-25 DOI:10.1109/TIM.2025.3553948

Hong Yang;Yuqiang Hu;Qihang Huang;Qing Sun;Hao Chen;Zhenyu Wu

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引用次数: 0

Abstract

Micro-cantilever device combined with interferometry ranging system, based on optical pressure, can convert the measurement of laser power to micro-displacement. The vibration state of the device directly affects the measurement response time and displacement noise level. The structural parameters of the micro-cantilever device are designed and simulated to ensure the linearity and sensitivity. The glass plate and the micro-cantilever device are used to form a thin air gap, and the vibration characteristics of the cantilever are improved by adjusting the squeeze-film damping, which reduces the measurement response time from 20 s to less than 0.5 s. The vibration characteristics of the micro-cantilever are investigated with different damping coefficient, and the response time is further optimized to 74 ms with an average displacement noise level of 10 nm. The calibration of the elastic coefficient is completed by using standard weights. High-power laser repeatability experiments and single pulse tests are carried out.

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来源期刊

IEEE Transactions on Instrumentation and Measurement 工程技术-工程：电子与电气

CiteScore

9.00

自引率

23.20%

发文量

1294

审稿时长

3.9 months

期刊介绍： Papers are sought that address innovative solutions to the development and use of electrical and electronic instruments and equipment to measure, monitor and/or record physical phenomena for the purpose of advancing measurement science, methods, functionality and applications. The scope of these papers may encompass: (1) theory, methodology, and practice of measurement; (2) design, development and evaluation of instrumentation and measurement systems and components used in generating, acquiring, conditioning and processing signals; (3) analysis, representation, display, and preservation of the information obtained from a set of measurements; and (4) scientific and technical support to establishment and maintenance of technical standards in the field of Instrumentation and Measurement.