Work function tuning of directly grown multi-layer graphene on silicon by PECVD and fabrication of Ag/ITO/Gr/n-Si/Ag solar cell

IF 4.3 3区材料科学 Q2 MATERIALS SCIENCE, COATINGS & FILMS

Diamond and Related Materials Pub Date : 2025-04-01 DOI:10.1016/j.diamond.2025.112271

Jai Shree Bhardwaj , Anterdipan Singh , Pratima Agarwal

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Abstract

Production of large-area, high-quality pristine graphene directly on silicon substrate from Chemical Vapor Deposition (CVD) method without metallic catalyst is highly desirable for its application in various semiconductor devices. In this work, we report synthesis of large area Graphene sheets by Plasma Enhanced Chemical Vapor Deposition (PECVD) with tunable work function based on the deposition conditions. To confirm the quality of Graphene, Raman, and XPS studies have been performed. The uniformity and surface morphology of the films has been confirmed and analyzed by FESEM. Surface roughness analysis is done by AFM. The work function has been measured through surface potential mapping by KPFM. We have observed the work function variation from 4.25 eV to 4.54 eV by varying the gas flow rates of methane and hydrogen. Later, Graphene prepared under optimized conditions were used to fabricate Ag/ITO/Gr/n-Si/Ag solar cell having efficiency of 1 %, current density of 25.52 mA/cm², V_oc of 0.13 V and FF of 0.29.

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PECVD在硅上直接生长多层石墨烯的功函数调谐及Ag/ITO/Gr/n-Si/Ag太阳能电池的制备

采用化学气相沉积（CVD）方法直接在硅衬底上生产大面积、高质量的原始石墨烯，无需金属催化剂，在各种半导体器件中应用是非常理想的。在这项工作中，我们报道了基于沉积条件可调的等离子体增强化学气相沉积（PECVD）大面积石墨烯片的合成。为了确认石墨烯的质量，进行了拉曼和XPS研究。用FESEM对膜的均匀性和表面形貌进行了验证和分析。表面粗糙度分析采用原子力显微镜进行。通过KPFM表面电位映射测量了功函数。通过改变甲烷和氢气的气体流速，我们观察到功函数在4.25 eV到4.54 eV之间的变化。随后，利用优化条件下制备的石墨烯制备出效率为1%、电流密度为25.52 mA/cm2、Voc为0.13 V、FF为0.29的Ag/ITO/Gr/n-Si/Ag太阳能电池。

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来源期刊

Diamond and Related Materials 工程技术-材料科学：综合

CiteScore

6.00

自引率

14.60%

发文量

702

审稿时长

2.1 months

期刊介绍： DRM is a leading international journal that publishes new fundamental and applied research on all forms of diamond, the integration of diamond with other advanced materials and development of technologies exploiting diamond. The synthesis, characterization and processing of single crystal diamond, polycrystalline films, nanodiamond powders and heterostructures with other advanced materials are encouraged topics for technical and review articles. In addition to diamond, the journal publishes manuscripts on the synthesis, characterization and application of other related materials including diamond-like carbons, carbon nanotubes, graphene, and boron and carbon nitrides. Articles are sought on the chemical functionalization of diamond and related materials as well as their use in electrochemistry, energy storage and conversion, chemical and biological sensing, imaging, thermal management, photonic and quantum applications, electron emission and electronic devices. The International Conference on Diamond and Carbon Materials has evolved into the largest and most well attended forum in the field of diamond, providing a forum to showcase the latest results in the science and technology of diamond and other carbon materials such as carbon nanotubes, graphene, and diamond-like carbon. Run annually in association with Diamond and Related Materials the conference provides junior and established researchers the opportunity to exchange the latest results ranging from fundamental physical and chemical concepts to applied research focusing on the next generation carbon-based devices.