Al2O3-improved CaZr4(PO4)6 composite ceramics for matched to the thermal expansion of silicon wafers

IF 1.8 4区材料科学 Q2 MATERIALS SCIENCE, CERAMICS

International Journal of Applied Ceramic Technology Pub Date : 2024-12-15 DOI:10.1111/ijac.15017

Limei Ruan, Yuanxun Li, Rui Yang, Fuyu Li

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Abstract

During silicon wafer testing, a mismatch between the thermal expansion characteristics of the wafer probe card and the silicon wafer is likely to result in the probe not being able to maintain precise alignment with the various contact points on the wafer. To address this challenge, CaZr₄(PO₄)₆ + x wt% Al₂O₃ composite ceramics (CZPA, x = 0–25) are prepared by the solid-phase reaction method. when x = 5, the bulk density achieves the maximum value (3.17 g/cm³). Young's modulus reaches a maximum (58 GPa) at x = 5. The x- and y-axis shrinkages are in the range of 5.67%–8.67% and the z-axis shrinkage is in the range of 7.11%–9.91%. The coefficients of thermal expansion (CTE) gradually increase with the increase of Al₂O₃ doping and achieve a near-Si thermal expansion coefficient at x = 15, which means that it matches the thermal expansion of silicon wafers. This ceramic developed in this work is expected to be applied to multilayer-matched substrates matched to silicon.

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Al2O3-improved CaZr4(PO4)6复合陶瓷与硅片热膨胀相匹配

在硅晶圆测试过程中，晶圆探头卡和硅晶圆的热膨胀特性之间的不匹配可能导致探头无法与晶圆上的各个接触点保持精确对准。为了解决这一挑战，采用固相反应方法制备了CaZr4(PO4)6 + x wt% Al2O3复合陶瓷（CZPA, x = 0-25）。当x = 5时，堆积密度达到最大值（3.17 g/cm3）。杨氏模量在x = 5时达到最大值（58 GPa）。x、y轴收缩率在5.67% ~ 8.67%之间，z轴收缩率在7.11% ~ 9.91%之间。随着Al2O3掺杂量的增加，热膨胀系数（CTE）逐渐增大，在x = 15处达到接近si的热膨胀系数，这意味着它与硅片的热膨胀相匹配。该陶瓷有望应用于与硅相匹配的多层匹配衬底。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Journal of Applied Ceramic Technology 工程技术-材料科学：硅酸盐

CiteScore

3.90

自引率

9.50%

发文量

280

审稿时长

4.5 months

期刊介绍： The International Journal of Applied Ceramic Technology publishes cutting edge applied research and development work focused on commercialization of engineered ceramics, products and processes. The publication also explores the barriers to commercialization, design and testing, environmental health issues, international standardization activities, databases, and cost models. Designed to get high quality information to end-users quickly, the peer process is led by an editorial board of experts from industry, government, and universities. Each issue focuses on a high-interest, high-impact topic plus includes a range of papers detailing applications of ceramics. Papers on all aspects of applied ceramics are welcome including those in the following areas: Nanotechnology applications; Ceramic Armor; Ceramic and Technology for Energy Applications (e.g., Fuel Cells, Batteries, Solar, Thermoelectric, and HT Superconductors); Ceramic Matrix Composites; Functional Materials; Thermal and Environmental Barrier Coatings; Bioceramic Applications; Green Manufacturing; Ceramic Processing; Glass Technology; Fiber optics; Ceramics in Environmental Applications; Ceramics in Electronic, Photonic and Magnetic Applications;