Chunyang Zou , Guangfeng Shi , Siwei Meng , Deshi Kong , Dong Yao
{"title":"Experimental study on in-situ laser-assisted diamond turning of single crystal germanium","authors":"Chunyang Zou , Guangfeng Shi , Siwei Meng , Deshi Kong , Dong Yao","doi":"10.1016/j.precisioneng.2025.03.032","DOIUrl":null,"url":null,"abstract":"<div><div>For typical optical crystals like silicon and germanium, conventional ultra-precision machining ensures high machining quality but significantly reduces efficiency. Consequently, in-situ laser-assisted turning has emerged as a viable alternative. This study focuses on the single crystal germanium (111) surface and establishes a temperature-dependent model for calculating the critical cutting thickness of ductile-to-brittle transition. Orthogonal experiments were conducted on in-situ laser-assisted turning, followed by variance analysis, signal-to-noise ratio analysis, and mean analysis of the post-machining surface roughness. The contribution of each machining parameter to reducing surface roughness is as follows: rake angle > laser power > spindle speed > feed rate > cutting depth. The optimized parameter combination identified is: rake angle of −35°, laser power of 10 W, spindle speed of 2000 r/min, feed rate of 1 μm/r, and cutting depth of 1 μm. Machining with these parameters reduced surface roughness by 22.4 % compared to conventional machining under the same conditions, resulting in a surface free of fractures and pits.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 608-622"},"PeriodicalIF":3.5000,"publicationDate":"2025-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0141635925001059","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}
引用次数: 0
Abstract
For typical optical crystals like silicon and germanium, conventional ultra-precision machining ensures high machining quality but significantly reduces efficiency. Consequently, in-situ laser-assisted turning has emerged as a viable alternative. This study focuses on the single crystal germanium (111) surface and establishes a temperature-dependent model for calculating the critical cutting thickness of ductile-to-brittle transition. Orthogonal experiments were conducted on in-situ laser-assisted turning, followed by variance analysis, signal-to-noise ratio analysis, and mean analysis of the post-machining surface roughness. The contribution of each machining parameter to reducing surface roughness is as follows: rake angle > laser power > spindle speed > feed rate > cutting depth. The optimized parameter combination identified is: rake angle of −35°, laser power of 10 W, spindle speed of 2000 r/min, feed rate of 1 μm/r, and cutting depth of 1 μm. Machining with these parameters reduced surface roughness by 22.4 % compared to conventional machining under the same conditions, resulting in a surface free of fractures and pits.
期刊介绍:
Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.