CF4 removal using liquid Sn alloy: Thermodynamic alloy design and experimental validation

IF 8.1 1区工程技术 Q1 ENGINEERING, CHEMICAL

Separation and Purification Technology Pub Date : 2025-04-02 DOI:10.1016/j.seppur.2025.132838

Kyungho Shin, Marie-Aline Van Ende, In-Ho Jung, Jung Hyeon Park, Uendo Lee, Hyeonjin Eom, Whi Dong Kim

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引用次数: 0

Abstract

The tight emission control of fluorinated gases such as PFCs, NF₃, and SF₆, extensively used in the semiconductor manufacturing process, is critical for reducing greenhouse gases and mitigating global warming. This study employed liquid Sn alloy to remove CF₄ gas, known for its strong bond energy among F-gases. Thermodynamic calculations were conducted with FactSage thermodynamic databases to design the most effective binary Sn alloy systems: Sn-Mg and Sn-Ca alloys. Through the bubble column apparatus, the N₂-CF₄ gas was bubbled into the selected liquid Sn alloys at 600 to 800 ℃, and outlet gas was analyzed using gas chromatography. The removal efficiency of CF₄ increased with temperature and concentration of reactive metal such as Mg and Ca. The efficiency of liquid Sn-Mg alloy was higher than that of liquid Sn-Ca alloy. More than 99 % removal of CF₄ gas was successfully obtained using liquid Sn-40 at.% Mg alloy at 800 ℃ by forming MgF₂ phase. The present study demonstrates that this novel approach using liquid Sn alloy can remove F-gases efficiently.

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来源期刊

Separation and Purification Technology 工程技术-工程：化工

CiteScore

14.00

自引率

12.80%

发文量

2347

审稿时长

43 days

期刊介绍： Separation and Purification Technology is a premier journal committed to sharing innovative methods for separation and purification in chemical and environmental engineering, encompassing both homogeneous solutions and heterogeneous mixtures. Our scope includes the separation and/or purification of liquids, vapors, and gases, as well as carbon capture and separation techniques. However, it's important to note that methods solely intended for analytical purposes are not within the scope of the journal. Additionally, disciplines such as soil science, polymer science, and metallurgy fall outside the purview of Separation and Purification Technology. Join us in advancing the field of separation and purification methods for sustainable solutions in chemical and environmental engineering.