A High-Performance Gas Sensor Employing a Spacer-Based Cavity With Distributed Bragg Reflectors

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2025-02-28 DOI:10.1109/JSEN.2025.3543877

Michal Gryga;Jakub Chylek;Dalibor Ciprian;Pavel Pokorny;Tomas Fort;Jaroslav Sobota;Petr Hlubina

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引用次数: 0

Abstract

A spacer-based cavity with distributed Bragg reflectors (DBRs) is employed in high-performance gas sensing utilizing wavelength interrogation. The DBR is formed by a 1-D photonic crystal (1DPhC) comprising six bilayers of TiO2/SiO2 with a termination layer of TiO2, and the spacer is a Ti layer deposited partially on one of the DBRs. The reflectance spectra of the sensor are measured in visible and near-infrared spectral regions at a near-normal incidence of light for humid air, and narrow dips in the 1DPhC bandgap due to the cavity modes are resolved. Two thicknesses of the spacer are considered, and it is revealed that the spacer thickness change is accompanied by nearly fivefold sensitivity enhancement. The sensitivity to relative humidity (RH) of humid air, a figure of merit (FOM), and the limit of detection reached 0.444 nm/%RH, 0.178%RH−1, and 0.022%RH, respectively. The theoretical analysis showed that the RH response of the sensor is due to the porous termination layer of the 1DPhC, and the strong dependence of the sensor sensitivity and FOM on both the spacer thickness and the position of the resonance dip in the bandgap was confirmed. A sensor employing a spacer-based cavity with DBRs thus represents an effective alternative with advantages such as sensing at normal incidence of light with high sensitivity and FOM.

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来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice