Effects of photocatalyst with different physical phases and properties on tribochemical reaction of 4H-SiC

IF 5.3 1区工程技术 Q1 ENGINEERING, MECHANICAL

Wear Pub Date : 2025-03-18 DOI:10.1016/j.wear.2025.206042

Zhijun Chen, Qiusheng Yan, Jisheng Pan, Hanhao Liu, Kaiyuan Luo, Jingyuan Zheng

引用次数: 0

Abstract

In photocatalytic-assisted magnetorheological polishing (PMRP), both the opacity of the magnetorheological fluid and the non-magnetic properties of the photocatalyst limit the processing efficiency and quality of SiC wafers. In this paper, the magnetorheological fluid is prepared by using photocatalysts with different physical phases (liquid/solid) and properties (magnetic/non-magnetic), and then the friction chemical mechanism is carried out on SiC. The results show that the transmittance of the magnetorheological fluid and the distribution state of the photocatalyst synergistically cooperate to control the chemical oxidation rate of single-crystal SiC. When using magnetic particles with photocatalytic coatings for processing, the photocatalytic reaction spots can be effectively constrained and the SiC oxidation efficiency can be improved.

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不同物相及性质光催化剂对4H-SiC摩擦化学反应的影响

在光催化辅助磁流变抛光（PMRP）中，磁流变液的不透明性和光催化剂的非磁性限制了SiC晶圆的加工效率和质量。本文采用具有不同物相（液体/固体）和不同性质（磁性/非磁性）的光催化剂制备了磁流变流体，并对SiC进行了摩擦化学机理研究。结果表明，磁流变液的透光率和光催化剂的分布状态协同作用，控制单晶SiC的化学氧化速率。利用磁性颗粒与光催化涂层进行加工，可以有效地约束光催化反应斑点，提高SiC氧化效率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Wear 工程技术-材料科学：综合

CiteScore

8.80

自引率

8.00%

发文量

280

审稿时长

47 days

期刊介绍： Wear journal is dedicated to the advancement of basic and applied knowledge concerning the nature of wear of materials. Broadly, topics of interest range from development of fundamental understanding of the mechanisms of wear to innovative solutions to practical engineering problems. Authors of experimental studies are expected to comment on the repeatability of the data, and whenever possible, conduct multiple measurements under similar testing conditions. Further, Wear embraces the highest standards of professional ethics, and the detection of matching content, either in written or graphical form, from other publications by the current authors or by others, may result in rejection.