Effects of photocatalyst with different physical phases and properties on tribochemical reaction of 4H-SiC

IF 5.3 1区工程技术 Q1 ENGINEERING, MECHANICAL

Wear Pub Date : 2025-03-18 DOI:10.1016/j.wear.2025.206042

Zhijun Chen, Qiusheng Yan, Jisheng Pan, Hanhao Liu, Kaiyuan Luo, Jingyuan Zheng

引用次数: 0

Abstract

In photocatalytic-assisted magnetorheological polishing (PMRP), both the opacity of the magnetorheological fluid and the non-magnetic properties of the photocatalyst limit the processing efficiency and quality of SiC wafers. In this paper, the magnetorheological fluid is prepared by using photocatalysts with different physical phases (liquid/solid) and properties (magnetic/non-magnetic), and then the friction chemical mechanism is carried out on SiC. The results show that the transmittance of the magnetorheological fluid and the distribution state of the photocatalyst synergistically cooperate to control the chemical oxidation rate of single-crystal SiC. When using magnetic particles with photocatalytic coatings for processing, the photocatalytic reaction spots can be effectively constrained and the SiC oxidation efficiency can be improved.

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来源期刊

Wear 工程技术-材料科学：综合

CiteScore

8.80

自引率

8.00%

发文量

280

审稿时长

47 days

期刊介绍： Wear journal is dedicated to the advancement of basic and applied knowledge concerning the nature of wear of materials. Broadly, topics of interest range from development of fundamental understanding of the mechanisms of wear to innovative solutions to practical engineering problems. Authors of experimental studies are expected to comment on the repeatability of the data, and whenever possible, conduct multiple measurements under similar testing conditions. Further, Wear embraces the highest standards of professional ethics, and the detection of matching content, either in written or graphical form, from other publications by the current authors or by others, may result in rejection.