{"title":"Modeling and Implementation of Synchronization for Large-Aperture Electromagnetic MEMS Mirrors.","authors":"Fahu Xu, Lingxiao Zhao","doi":"10.3390/mi16030268","DOIUrl":null,"url":null,"abstract":"<p><p>MEMS-based LiDAR has showcased extensive application potential in the autonomous driving sector, attributed to its cost-effectiveness, compactness, and seamless integration capabilities. However, MEMS LiDAR suffers from a short detection range, due to the small receiving aperture of the MEMS mirror. Our early study attempted to increase the detection range of MEMS LiDAR with a semi-coaxial design. In this paper, we further investigate the synchronization method for large-aperture electromagnetic MEMS mirrors, in which a synchronous motion transfer model of electromagnetic MEMS mirrors is constructed. The results of the simulations and experiments demonstrate that two electromagnetic MEMS mirrors are synchronous with an aperture of 60 π mm2, FoV of 60°, and scanning frequency of 220 Hz. The entire synchronization process of the electromagnetic MEMS mirrors is completed within 10 s, which verifies the feasibility of synchronizing large-aperture electromagnetic MEMS mirrors to increase the detection range of MEMS LiDAR.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 3","pages":""},"PeriodicalIF":3.0000,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11944047/pdf/","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micromachines","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.3390/mi16030268","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, ANALYTICAL","Score":null,"Total":0}
引用次数: 0
Abstract
MEMS-based LiDAR has showcased extensive application potential in the autonomous driving sector, attributed to its cost-effectiveness, compactness, and seamless integration capabilities. However, MEMS LiDAR suffers from a short detection range, due to the small receiving aperture of the MEMS mirror. Our early study attempted to increase the detection range of MEMS LiDAR with a semi-coaxial design. In this paper, we further investigate the synchronization method for large-aperture electromagnetic MEMS mirrors, in which a synchronous motion transfer model of electromagnetic MEMS mirrors is constructed. The results of the simulations and experiments demonstrate that two electromagnetic MEMS mirrors are synchronous with an aperture of 60 π mm2, FoV of 60°, and scanning frequency of 220 Hz. The entire synchronization process of the electromagnetic MEMS mirrors is completed within 10 s, which verifies the feasibility of synchronizing large-aperture electromagnetic MEMS mirrors to increase the detection range of MEMS LiDAR.
期刊介绍：
Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.
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