Back Propagation Neural Network-Based Predictive Model for Magnetorheological-Chemical Polishing of Silicon Carbide.

IF 3 3区 工程技术 Q2 CHEMISTRY, ANALYTICAL
Micromachines Pub Date : 2025-02-27 DOI:10.3390/mi16030271
Huazhuo Liang, Wenjie Chen, Youzhi Fu, Wenjie Zhou, Ling Mo, Yue Jian, Qi Wen, Dawei Liu, Junfeng He
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Abstract

Magnetorheological-chemical-polishing tests are carried out on single-crystal silicon carbide (SiC) to study the influence of the process parameters on the polishing effect, predict the polishing results via a back propagation (BP) neural network, and construct a model of the processing parameters to predict the material removal rate (MRR) and surface quality. Magnetorheological-chemical polishing employs mechanical removal coupled with chemical action, and the synergistic effect of both actions can achieve an improved polishing effect. The results show that with increasing abrasive particle size, hydrogen peroxide concentration, workpiece rotational speed, and polishing disc rotational speed, the MRR first increases and then decreases. With an increasing abrasive concentration and carbonyl iron powder concentration, the MRR continues to increase. With an increasing machining gap, the MRR shows a continuous decrease, and the corresponding changes in surface roughness tend to decrease first and then increase. The prediction models of the MRR and surface quality are constructed via a BP neural network, and their average absolute percentage errors are less than 2%, which is important for the online monitoring of processing and process optimisation.

基于反向传播神经网络的碳化硅磁流变化学抛光预测模型。
对单晶硅(SiC)进行磁流变-化学-抛光试验,研究工艺参数对抛光效果的影响,通过BP神经网络预测抛光结果,建立工艺参数模型预测材料去除率(MRR)和表面质量。磁流变化学抛光采用机械去除和化学作用相结合的方法,两种作用的协同作用可以达到提高抛光效果的目的。结果表明:随着磨料粒度、过氧化氢浓度、工件转速和抛光盘转速的增加,MRR先增大后减小;随着磨料浓度和羰基铁粉浓度的增加,MRR继续增加。随着加工间隙的增大,MRR呈连续减小的趋势,相应的表面粗糙度变化呈先减小后增大的趋势。利用BP神经网络建立了MRR和表面质量的预测模型,其平均绝对百分比误差小于2%,这对加工过程的在线监测和工艺优化具有重要意义。
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来源期刊
Micromachines
Micromachines NANOSCIENCE & NANOTECHNOLOGY-INSTRUMENTS & INSTRUMENTATION
CiteScore
5.20
自引率
14.70%
发文量
1862
审稿时长
16.31 days
期刊介绍: Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.
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