On-chip compact radio frequency metal self-rolled-up nanomembrane resonator

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-03-24 DOI:10.1063/5.0253261

Xianchao Wei, Shuyao Yan, Zhengji Xia, Zhikun Zhou, Lei Sang, Wen Huang

引用次数: 0

Abstract

The miniaturization of the on-chip radio frequency (RF) resonators is critical for the development of the next-generation compact mobile equipment. The commonly used RF inductor–capacitor (L-C) resonators usually occupy a large chip area due to the low electromagnetic energy of their planar structure design. In this paper, we demonstrated a self-rolled-up nanomembrane (SRuM) platform utilizing metal stress to realize the rolling process, which enables the fabrication of on-chip L-C microtube resonators with a compact size. Compared to the RF silicon nitride (SiNx) SRuM L-C resonators, the metal SRuM L-C resonators show 47% smaller inner diameter and on-chip footprint. The design principle to achieve optimized electrical performance is also discussed in detail.

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片上射频（RF）谐振器的微型化对于下一代紧凑型移动设备的开发至关重要。常用的射频电感电容（L-C）谐振器由于其平面结构设计的电磁能量较低，通常占用较大的芯片面积。在本文中，我们展示了一种利用金属应力实现轧制工艺的自轧制纳米膜（SRuM）平台，它能够制造出尺寸紧凑的片上 L-C 微管谐振器。与射频氮化硅（SiNx）SRuM L-C 谐振器相比，金属 SRuM L-C 谐振器的内径和片上占位面积缩小了 47%。此外，还详细讨论了实现最佳电气性能的设计原理。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.