S. V. Belaya, E. A. Maksimovskiy, A. N. Kolodin, A. A. Shapovalova
{"title":"Morphology and Wettability of Hexagonal BCxNy Films Prepared by Plasma-Enhanced Chemical Vapor Deposition from Trimethylamine Borane","authors":"S. V. Belaya, E. A. Maksimovskiy, A. N. Kolodin, A. A. Shapovalova","doi":"10.1134/S2635167624600780","DOIUrl":null,"url":null,"abstract":"<p>Hexagonal boron carbonitride films are obtained by plasma-enhanced chemical vapor deposition using a mixture of trimethylamine borane ((<i>Me</i>)<sub>3</sub>N·BH<sub>3</sub>) vapor and nitrogen in the temperature range 100‒700°C. The influence of the synthesis temperature, generator frequency, and plasma power on the chemical composition, structure, and morphology of the films is studied. The films obtained at temperatures of 200–700 and 300–700°C and generator frequencies of 27.12 and 13.56 MHz, respectively, are formed by nanowalls. Up to 600°C, the nanowalls have a maze-like morphology. The length of the nanowalls and the distance between them can be adjusted by changing the synthesis conditions. Above 600°C, nanowalls with a wavy morphology are formed. The contact angle of the water wetting of 200-nm-thick films varied within 0°‒62°.</p>","PeriodicalId":716,"journal":{"name":"Nanotechnologies in Russia","volume":"19 1 supplement","pages":"S84 - S92"},"PeriodicalIF":0.8000,"publicationDate":"2025-03-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanotechnologies in Russia","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1134/S2635167624600780","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Engineering","Score":null,"Total":0}
引用次数: 0
Abstract
Hexagonal boron carbonitride films are obtained by plasma-enhanced chemical vapor deposition using a mixture of trimethylamine borane ((Me)3N·BH3) vapor and nitrogen in the temperature range 100‒700°C. The influence of the synthesis temperature, generator frequency, and plasma power on the chemical composition, structure, and morphology of the films is studied. The films obtained at temperatures of 200–700 and 300–700°C and generator frequencies of 27.12 and 13.56 MHz, respectively, are formed by nanowalls. Up to 600°C, the nanowalls have a maze-like morphology. The length of the nanowalls and the distance between them can be adjusted by changing the synthesis conditions. Above 600°C, nanowalls with a wavy morphology are formed. The contact angle of the water wetting of 200-nm-thick films varied within 0°‒62°.
期刊介绍：
Nanobiotechnology Reports publishes interdisciplinary research articles on fundamental aspects of the structure and properties of nanoscale objects and nanomaterials, polymeric and bioorganic molecules, and supramolecular and biohybrid complexes, as well as articles that discuss technologies for their preparation and processing, and practical implementation of products, devices, and nature-like systems based on them. The journal publishes original articles and reviews that meet the highest scientific quality standards in the following areas of science and technology studies: self-organizing structures and nanoassemblies; nanostructures, including nanotubes; functional and structural nanomaterials; polymeric, bioorganic, and hybrid nanomaterials; devices and products based on nanomaterials and nanotechnology; nanobiology and genetics, and omics technologies; nanobiomedicine and nanopharmaceutics; nanoelectronics and neuromorphic computing systems; neurocognitive systems and technologies; nanophotonics; natural science methods in a study of cultural heritage items; metrology, standardization, and monitoring in nanotechnology.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
