Sub-gram PZT actuated micro rotation stages realizing high bandwidth and load

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-03-20 DOI:10.1016/j.sna.2025.116488

Junji Pu, Yulie Wu, Chunyan Qu, Canhui Yin, Dingbang Xiao, Xuezhong Wu

引用次数: 0

Abstract

The lightweight micro rotation (MR) stages with the advantage of realizing controllable movement in limited space, offer extensive application potential in fields like micro robots, drones and augmented reality interaction. To adapt to different scenarios, this paper develops various sub-gram MR stages driven by piezoelectric (PZT) actuators to achieve rotation movements of specialized performance, including high bandwidth, high load, and both high in bandwidth and load. Experimental results show that the MR stages can achieve a wide rotational range over ± 30° and a high bandwidth (0—508.2 Hz) with sub-gram weight (maximum 960 mg). Moreover, under 1 Hz driving, they have a maximum absolute load capacity of 11.1 g or relative load capacity of 24.6 times of its own weight. This work confirms that the MR stages can be used as universal actuators, which are inspiring for driving and execution in micro robotic and other fields under complex scenes.

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...