Hybrid physics and data-driven modeling for edge control and form correction in the surface adaptive polishing of the optical surface

Abstract

The novel surface adaptive polishing (SAP) process is a promising approach for ultra-precision polishing of optical free-form surfaces. However, further investigation into the damage control mechanism and form control theory of this approach is required. A series of experimental studies has been conducted to determine the influencing mechanisms of the polishing parameters on the surface and subsurface states. The surface quality can be significantly improved, and the surface and subsurface damage is effectively mitigated when using the SAP tool for polishing, whether applied internally or at the edge of the workpiece. Moreover, theoretical modeling of form correction will be undertaken, focusing on developing a multi-scale physics and data-driven material removal model. The maximum removal depth at the edge exponentially varies with the overhang ratio. Accordingly, a correction coefficient is established to characterize the spatial distribution of the tool in the material removal function. Experimental and simulation results demonstrate high consistency in the validation experiments. The findings of this study are not only significant for ultra-precision polishing of the SAP tool but also provide a comprehensive approach for future research on edge control and form correction.