Lei Wen , Wentian Fan , Jiahong Kang , Haizhou Huang
{"title":"Porous pressure sensors from mechanisms to application: A review","authors":"Lei Wen , Wentian Fan , Jiahong Kang , Haizhou Huang","doi":"10.1016/j.sna.2025.116461","DOIUrl":null,"url":null,"abstract":"<div><div>In recent years, the advancement of Internet of Things (IoT) technology has led to the continuous expansion of flexible pressure sensor applications in various fields such as human-machine interaction, health monitoring, robot control, and electronic skins (E-skins). The increasing demand for high-performance flexible pressure sensors is driven by their immense market potential. Porous structures with small elastic modulus, high porosity, and large specific surface area offer unique advantages in the design of flexible pressure sensors by mitigating the trade-off between device sensitivity and detection range. This paper provides a comprehensive summary of resistive, capacitive, piezoelectric, and triboelectric pressure sensors based on porous structures with high sensing performance. It also highlights the rational utilization of porous structures in these pressure sensors and presents the latest advancements in manufacturing techniques. Furthermore, this paper briefly introduces the current applications of porous structure-based pressure sensors especially in motion monitoring, healthcare systems, E-skins. Finally, both challenges and opportunities that lie ahead in this field are summarized.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"387 ","pages":"Article 116461"},"PeriodicalIF":4.1000,"publicationDate":"2025-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators A-physical","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924424725002675","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
In recent years, the advancement of Internet of Things (IoT) technology has led to the continuous expansion of flexible pressure sensor applications in various fields such as human-machine interaction, health monitoring, robot control, and electronic skins (E-skins). The increasing demand for high-performance flexible pressure sensors is driven by their immense market potential. Porous structures with small elastic modulus, high porosity, and large specific surface area offer unique advantages in the design of flexible pressure sensors by mitigating the trade-off between device sensitivity and detection range. This paper provides a comprehensive summary of resistive, capacitive, piezoelectric, and triboelectric pressure sensors based on porous structures with high sensing performance. It also highlights the rational utilization of porous structures in these pressure sensors and presents the latest advancements in manufacturing techniques. Furthermore, this paper briefly introduces the current applications of porous structure-based pressure sensors especially in motion monitoring, healthcare systems, E-skins. Finally, both challenges and opportunities that lie ahead in this field are summarized.
期刊介绍:
Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas:
• Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results.
• Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon.
• Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays.
• Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers.
Etc...